JPS63162702U - - Google Patents
Info
- Publication number
- JPS63162702U JPS63162702U JP5597687U JP5597687U JPS63162702U JP S63162702 U JPS63162702 U JP S63162702U JP 5597687 U JP5597687 U JP 5597687U JP 5597687 U JP5597687 U JP 5597687U JP S63162702 U JPS63162702 U JP S63162702U
- Authority
- JP
- Japan
- Prior art keywords
- opening
- cassette case
- parallel
- lifter
- disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Special Conveying (AREA)
- Warehouses Or Storage Devices (AREA)
- Automatic Disk Changers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987055976U JPH0432322Y2 (https=) | 1987-04-15 | 1987-04-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987055976U JPH0432322Y2 (https=) | 1987-04-15 | 1987-04-15 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63162702U true JPS63162702U (https=) | 1988-10-24 |
| JPH0432322Y2 JPH0432322Y2 (https=) | 1992-08-04 |
Family
ID=30884372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987055976U Expired JPH0432322Y2 (https=) | 1987-04-15 | 1987-04-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0432322Y2 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS606504A (ja) * | 1983-05-18 | 1985-01-14 | マイクロ・グラス・インコ−ポレ−テツド | ウエハ−移送システム及び方法 |
-
1987
- 1987-04-15 JP JP1987055976U patent/JPH0432322Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS606504A (ja) * | 1983-05-18 | 1985-01-14 | マイクロ・グラス・インコ−ポレ−テツド | ウエハ−移送システム及び方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0432322Y2 (https=) | 1992-08-04 |