JPS63162702U - - Google Patents

Info

Publication number
JPS63162702U
JPS63162702U JP5597687U JP5597687U JPS63162702U JP S63162702 U JPS63162702 U JP S63162702U JP 5597687 U JP5597687 U JP 5597687U JP 5597687 U JP5597687 U JP 5597687U JP S63162702 U JPS63162702 U JP S63162702U
Authority
JP
Japan
Prior art keywords
opening
cassette case
parallel
lifter
disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5597687U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0432322Y2 (da
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987055976U priority Critical patent/JPH0432322Y2/ja
Publication of JPS63162702U publication Critical patent/JPS63162702U/ja
Application granted granted Critical
Publication of JPH0432322Y2 publication Critical patent/JPH0432322Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Automatic Disk Changers (AREA)
JP1987055976U 1987-04-15 1987-04-15 Expired JPH0432322Y2 (da)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987055976U JPH0432322Y2 (da) 1987-04-15 1987-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987055976U JPH0432322Y2 (da) 1987-04-15 1987-04-15

Publications (2)

Publication Number Publication Date
JPS63162702U true JPS63162702U (da) 1988-10-24
JPH0432322Y2 JPH0432322Y2 (da) 1992-08-04

Family

ID=30884372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987055976U Expired JPH0432322Y2 (da) 1987-04-15 1987-04-15

Country Status (1)

Country Link
JP (1) JPH0432322Y2 (da)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS606504A (ja) * 1983-05-18 1985-01-14 マイクロ・グラス・インコ−ポレ−テツド ウエハ−移送システム及び方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS606504A (ja) * 1983-05-18 1985-01-14 マイクロ・グラス・インコ−ポレ−テツド ウエハ−移送システム及び方法

Also Published As

Publication number Publication date
JPH0432322Y2 (da) 1992-08-04

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