JPS63162537U - - Google Patents
Info
- Publication number
- JPS63162537U JPS63162537U JP5430387U JP5430387U JPS63162537U JP S63162537 U JPS63162537 U JP S63162537U JP 5430387 U JP5430387 U JP 5430387U JP 5430387 U JP5430387 U JP 5430387U JP S63162537 U JPS63162537 U JP S63162537U
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- plasma
- semiconductor device
- oxygen
- interlayer insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000011229 interlayer Substances 0.000 claims description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 229910001882 dioxygen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 238000000927 vapour-phase epitaxy Methods 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5430387U JPS63162537U (enrdf_load_stackoverflow) | 1987-04-10 | 1987-04-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5430387U JPS63162537U (enrdf_load_stackoverflow) | 1987-04-10 | 1987-04-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63162537U true JPS63162537U (enrdf_load_stackoverflow) | 1988-10-24 |
Family
ID=30881168
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5430387U Pending JPS63162537U (enrdf_load_stackoverflow) | 1987-04-10 | 1987-04-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63162537U (enrdf_load_stackoverflow) |
-
1987
- 1987-04-10 JP JP5430387U patent/JPS63162537U/ja active Pending