JPS63162537U - - Google Patents

Info

Publication number
JPS63162537U
JPS63162537U JP5430387U JP5430387U JPS63162537U JP S63162537 U JPS63162537 U JP S63162537U JP 5430387 U JP5430387 U JP 5430387U JP 5430387 U JP5430387 U JP 5430387U JP S63162537 U JPS63162537 U JP S63162537U
Authority
JP
Japan
Prior art keywords
oxide film
plasma
semiconductor device
oxygen
interlayer insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5430387U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5430387U priority Critical patent/JPS63162537U/ja
Publication of JPS63162537U publication Critical patent/JPS63162537U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP5430387U 1987-04-10 1987-04-10 Pending JPS63162537U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5430387U JPS63162537U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5430387U JPS63162537U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Publications (1)

Publication Number Publication Date
JPS63162537U true JPS63162537U (enrdf_load_stackoverflow) 1988-10-24

Family

ID=30881168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5430387U Pending JPS63162537U (enrdf_load_stackoverflow) 1987-04-10 1987-04-10

Country Status (1)

Country Link
JP (1) JPS63162537U (enrdf_load_stackoverflow)

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