JPS63162434U - - Google Patents
Info
- Publication number
- JPS63162434U JPS63162434U JP5510187U JP5510187U JPS63162434U JP S63162434 U JPS63162434 U JP S63162434U JP 5510187 U JP5510187 U JP 5510187U JP 5510187 U JP5510187 U JP 5510187U JP S63162434 U JPS63162434 U JP S63162434U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- diaphragm
- side contact
- movable side
- elastic body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000000696 magnetic material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
Landscapes
- Micromachines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5510187U JPS63162434U (enExample) | 1987-04-10 | 1987-04-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5510187U JPS63162434U (enExample) | 1987-04-10 | 1987-04-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63162434U true JPS63162434U (enExample) | 1988-10-24 |
Family
ID=30882700
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5510187U Pending JPS63162434U (enExample) | 1987-04-10 | 1987-04-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63162434U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6155838A (ja) * | 1984-08-28 | 1986-03-20 | 株式会社 大興電機製作所 | 圧電形駆動機構 |
-
1987
- 1987-04-10 JP JP5510187U patent/JPS63162434U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6155838A (ja) * | 1984-08-28 | 1986-03-20 | 株式会社 大興電機製作所 | 圧電形駆動機構 |