JPS631620U - - Google Patents

Info

Publication number
JPS631620U
JPS631620U JP9631686U JP9631686U JPS631620U JP S631620 U JPS631620 U JP S631620U JP 9631686 U JP9631686 U JP 9631686U JP 9631686 U JP9631686 U JP 9631686U JP S631620 U JPS631620 U JP S631620U
Authority
JP
Japan
Prior art keywords
gas
pipe
wet type
tip
flow path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9631686U
Other languages
English (en)
Japanese (ja)
Other versions
JPH044813Y2 (US20110009641A1-20110113-C00116.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986096316U priority Critical patent/JPH044813Y2/ja
Publication of JPS631620U publication Critical patent/JPS631620U/ja
Application granted granted Critical
Publication of JPH044813Y2 publication Critical patent/JPH044813Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Treating Waste Gases (AREA)
JP1986096316U 1986-06-24 1986-06-24 Expired JPH044813Y2 (US20110009641A1-20110113-C00116.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986096316U JPH044813Y2 (US20110009641A1-20110113-C00116.png) 1986-06-24 1986-06-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986096316U JPH044813Y2 (US20110009641A1-20110113-C00116.png) 1986-06-24 1986-06-24

Publications (2)

Publication Number Publication Date
JPS631620U true JPS631620U (US20110009641A1-20110113-C00116.png) 1988-01-07
JPH044813Y2 JPH044813Y2 (US20110009641A1-20110113-C00116.png) 1992-02-12

Family

ID=30961918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986096316U Expired JPH044813Y2 (US20110009641A1-20110113-C00116.png) 1986-06-24 1986-06-24

Country Status (1)

Country Link
JP (1) JPH044813Y2 (US20110009641A1-20110113-C00116.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008205090A (ja) * 2007-02-19 2008-09-04 Taiyo Nippon Sanso Corp 気相成長装置
US7553356B2 (en) 2004-10-12 2009-06-30 Sumco Corporation Exhaust gas scrubber for epitaxial wafer manufacturing device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916544U (US20110009641A1-20110113-C00116.png) * 1972-05-19 1974-02-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4916544U (US20110009641A1-20110113-C00116.png) * 1972-05-19 1974-02-12

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7553356B2 (en) 2004-10-12 2009-06-30 Sumco Corporation Exhaust gas scrubber for epitaxial wafer manufacturing device
JP2008205090A (ja) * 2007-02-19 2008-09-04 Taiyo Nippon Sanso Corp 気相成長装置

Also Published As

Publication number Publication date
JPH044813Y2 (US20110009641A1-20110113-C00116.png) 1992-02-12

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