JPS63161226U - - Google Patents
Info
- Publication number
- JPS63161226U JPS63161226U JP5372287U JP5372287U JPS63161226U JP S63161226 U JPS63161226 U JP S63161226U JP 5372287 U JP5372287 U JP 5372287U JP 5372287 U JP5372287 U JP 5372287U JP S63161226 U JPS63161226 U JP S63161226U
- Authority
- JP
- Japan
- Prior art keywords
- magazine
- floating device
- air floating
- wafer
- shaped workpiece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5372287U JPS63161226U (ko) | 1987-04-09 | 1987-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5372287U JPS63161226U (ko) | 1987-04-09 | 1987-04-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63161226U true JPS63161226U (ko) | 1988-10-21 |
Family
ID=30880051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5372287U Pending JPS63161226U (ko) | 1987-04-09 | 1987-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63161226U (ko) |
-
1987
- 1987-04-09 JP JP5372287U patent/JPS63161226U/ja active Pending