JPS63160408U - - Google Patents

Info

Publication number
JPS63160408U
JPS63160408U JP5407187U JP5407187U JPS63160408U JP S63160408 U JPS63160408 U JP S63160408U JP 5407187 U JP5407187 U JP 5407187U JP 5407187 U JP5407187 U JP 5407187U JP S63160408 U JPS63160408 U JP S63160408U
Authority
JP
Japan
Prior art keywords
chamber
diaphragm
inlet
spring
negative pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5407187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5407187U priority Critical patent/JPS63160408U/ja
Publication of JPS63160408U publication Critical patent/JPS63160408U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
  • Fluid-Pressure Circuits (AREA)
JP5407187U 1987-04-08 1987-04-08 Pending JPS63160408U (US07118763-20061010-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5407187U JPS63160408U (US07118763-20061010-C00002.png) 1987-04-08 1987-04-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5407187U JPS63160408U (US07118763-20061010-C00002.png) 1987-04-08 1987-04-08

Publications (1)

Publication Number Publication Date
JPS63160408U true JPS63160408U (US07118763-20061010-C00002.png) 1988-10-20

Family

ID=30880721

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5407187U Pending JPS63160408U (US07118763-20061010-C00002.png) 1987-04-08 1987-04-08

Country Status (1)

Country Link
JP (1) JPS63160408U (US07118763-20061010-C00002.png)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932324U (US07118763-20061010-C00002.png) * 1972-06-23 1974-03-20
JPS51106892A (ja) * 1975-03-18 1976-09-22 Daikin Ind Ltd Ekiatsushindohatsuseisochi
JPS5439713U (US07118763-20061010-C00002.png) * 1977-08-25 1979-03-16

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4932324U (US07118763-20061010-C00002.png) * 1972-06-23 1974-03-20
JPS51106892A (ja) * 1975-03-18 1976-09-22 Daikin Ind Ltd Ekiatsushindohatsuseisochi
JPS5439713U (US07118763-20061010-C00002.png) * 1977-08-25 1979-03-16

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