JPS63159839U - - Google Patents

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Publication number
JPS63159839U
JPS63159839U JP5256287U JP5256287U JPS63159839U JP S63159839 U JPS63159839 U JP S63159839U JP 5256287 U JP5256287 U JP 5256287U JP 5256287 U JP5256287 U JP 5256287U JP S63159839 U JPS63159839 U JP S63159839U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
storage jig
wall
pockets
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5256287U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5256287U priority Critical patent/JPS63159839U/ja
Publication of JPS63159839U publication Critical patent/JPS63159839U/ja
Pending legal-status Critical Current

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Description

【図面の簡単な説明】
第１図は、本考案の実施例の斜視図であり、第
２図は実施例において、実際に半導体ウエーハを
収納したときの正面図である。また第３図は従来
の半導体ウエーハ用収納治具の斜視図であり、第
４図は実際に半導体ウエーハを収納したときの正
面図である。 なお、図において、１……半導体ウエーハ用収
納治具のポケツト、２……半導体ウエーハ用収納
治具のポケツトの壁、３……本考案の効果を示す
ポケツトの横溝、４……半導体ウエーハである。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体ウエハ用収納治具において、半導体ウエ
    ーハが入るポケツトとポケツトとの間の壁に半導
    体ウエーハの入る方向と垂直に複数本の溝を有す
    ることを特徴とする半導体ウエーハ用収納治具。
JP5256287U 1987-04-06 1987-04-06 Pending JPS63159839U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5256287U JPS63159839U (ja) 1987-04-06 1987-04-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5256287U JPS63159839U (ja) 1987-04-06 1987-04-06

Publications (1)

Publication Number Publication Date
JPS63159839U true JPS63159839U (ja) 1988-10-19

Family

ID=30877839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5256287U Pending JPS63159839U (ja) 1987-04-06 1987-04-06

Country Status (1)

Country Link
JP (1) JPS63159839U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6167242A (ja) * 1984-09-10 1986-04-07 Mitsubishi Electric Corp ウエ−ハ収容治具

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6167242A (ja) * 1984-09-10 1986-04-07 Mitsubishi Electric Corp ウエ−ハ収容治具

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