JPS63159837U - - Google Patents
Info
- Publication number
- JPS63159837U JPS63159837U JP5375187U JP5375187U JPS63159837U JP S63159837 U JPS63159837 U JP S63159837U JP 5375187 U JP5375187 U JP 5375187U JP 5375187 U JP5375187 U JP 5375187U JP S63159837 U JPS63159837 U JP S63159837U
- Authority
- JP
- Japan
- Prior art keywords
- metal insert
- recess
- wafer
- wafer chuck
- rotating shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims 2
- 229920003002 synthetic resin Polymers 0.000 claims 1
- 239000000057 synthetic resin Substances 0.000 claims 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5375187U JPS63159837U (de) | 1987-04-09 | 1987-04-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5375187U JPS63159837U (de) | 1987-04-09 | 1987-04-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159837U true JPS63159837U (de) | 1988-10-19 |
Family
ID=30880103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5375187U Pending JPS63159837U (de) | 1987-04-09 | 1987-04-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159837U (de) |
-
1987
- 1987-04-09 JP JP5375187U patent/JPS63159837U/ja active Pending
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