JPS63159834U - - Google Patents
Info
- Publication number
- JPS63159834U JPS63159834U JP5243887U JP5243887U JPS63159834U JP S63159834 U JPS63159834 U JP S63159834U JP 5243887 U JP5243887 U JP 5243887U JP 5243887 U JP5243887 U JP 5243887U JP S63159834 U JPS63159834 U JP S63159834U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafers
- hole
- holding claw
- taking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000004065 semiconductor Substances 0.000 claims 2
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
- Warehouses Or Storage Devices (AREA)
- Pile Receivers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5243887U JPS63159834U (enExample) | 1987-04-07 | 1987-04-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5243887U JPS63159834U (enExample) | 1987-04-07 | 1987-04-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159834U true JPS63159834U (enExample) | 1988-10-19 |
Family
ID=30877604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5243887U Pending JPS63159834U (enExample) | 1987-04-07 | 1987-04-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159834U (enExample) |
-
1987
- 1987-04-07 JP JP5243887U patent/JPS63159834U/ja active Pending