JPS63159834U - - Google Patents

Info

Publication number
JPS63159834U
JPS63159834U JP5243887U JP5243887U JPS63159834U JP S63159834 U JPS63159834 U JP S63159834U JP 5243887 U JP5243887 U JP 5243887U JP 5243887 U JP5243887 U JP 5243887U JP S63159834 U JPS63159834 U JP S63159834U
Authority
JP
Japan
Prior art keywords
cassette
wafers
hole
holding claw
taking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5243887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5243887U priority Critical patent/JPS63159834U/ja
Publication of JPS63159834U publication Critical patent/JPS63159834U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
JP5243887U 1987-04-07 1987-04-07 Pending JPS63159834U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5243887U JPS63159834U (enrdf_load_stackoverflow) 1987-04-07 1987-04-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5243887U JPS63159834U (enrdf_load_stackoverflow) 1987-04-07 1987-04-07

Publications (1)

Publication Number Publication Date
JPS63159834U true JPS63159834U (enrdf_load_stackoverflow) 1988-10-19

Family

ID=30877604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5243887U Pending JPS63159834U (enrdf_load_stackoverflow) 1987-04-07 1987-04-07

Country Status (1)

Country Link
JP (1) JPS63159834U (enrdf_load_stackoverflow)

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