JPS63159826U - - Google Patents

Info

Publication number
JPS63159826U
JPS63159826U JP5232087U JP5232087U JPS63159826U JP S63159826 U JPS63159826 U JP S63159826U JP 5232087 U JP5232087 U JP 5232087U JP 5232087 U JP5232087 U JP 5232087U JP S63159826 U JPS63159826 U JP S63159826U
Authority
JP
Japan
Prior art keywords
air blowing
foreign matter
substrate
blowing hole
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5232087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5232087U priority Critical patent/JPS63159826U/ja
Publication of JPS63159826U publication Critical patent/JPS63159826U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP5232087U 1987-04-07 1987-04-07 Pending JPS63159826U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5232087U JPS63159826U (enrdf_load_stackoverflow) 1987-04-07 1987-04-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5232087U JPS63159826U (enrdf_load_stackoverflow) 1987-04-07 1987-04-07

Publications (1)

Publication Number Publication Date
JPS63159826U true JPS63159826U (enrdf_load_stackoverflow) 1988-10-19

Family

ID=30877385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5232087U Pending JPS63159826U (enrdf_load_stackoverflow) 1987-04-07 1987-04-07

Country Status (1)

Country Link
JP (1) JPS63159826U (enrdf_load_stackoverflow)

Similar Documents

Publication Publication Date Title
JPS63159826U (enrdf_load_stackoverflow)
JPH0187896U (enrdf_load_stackoverflow)
JPH0359926U (enrdf_load_stackoverflow)
JPS633142U (enrdf_load_stackoverflow)
JPS62114444U (enrdf_load_stackoverflow)
JPS61198035U (enrdf_load_stackoverflow)
JPS63109065U (enrdf_load_stackoverflow)
JPS6147218U (ja) 自動供給装置
JPS6263801U (enrdf_load_stackoverflow)
JPH0157902U (enrdf_load_stackoverflow)
JPS62287U (enrdf_load_stackoverflow)
JPS6371696U (enrdf_load_stackoverflow)
JPH028134U (enrdf_load_stackoverflow)
JPS62168236U (enrdf_load_stackoverflow)
JPS61130541U (enrdf_load_stackoverflow)
JPS61139974U (enrdf_load_stackoverflow)
JPH0169000U (enrdf_load_stackoverflow)
JPS6380846U (enrdf_load_stackoverflow)
JPH0478227U (enrdf_load_stackoverflow)
JPS6317132U (enrdf_load_stackoverflow)
JPS63168659U (enrdf_load_stackoverflow)
JPS62152475U (enrdf_load_stackoverflow)
JPH0266803U (enrdf_load_stackoverflow)
JPH02110040U (enrdf_load_stackoverflow)
JPH01153876U (enrdf_load_stackoverflow)