JPS63159824U - - Google Patents
Info
- Publication number
- JPS63159824U JPS63159824U JP5362087U JP5362087U JPS63159824U JP S63159824 U JPS63159824 U JP S63159824U JP 5362087 U JP5362087 U JP 5362087U JP 5362087 U JP5362087 U JP 5362087U JP S63159824 U JPS63159824 U JP S63159824U
- Authority
- JP
- Japan
- Prior art keywords
- spin coating
- semiconductor manufacturing
- cup
- large number
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000004528 spin coating Methods 0.000 claims 2
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5362087U JPS63159824U (cs) | 1987-04-08 | 1987-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5362087U JPS63159824U (cs) | 1987-04-08 | 1987-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159824U true JPS63159824U (cs) | 1988-10-19 |
Family
ID=30879857
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5362087U Pending JPS63159824U (cs) | 1987-04-08 | 1987-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159824U (cs) |
-
1987
- 1987-04-08 JP JP5362087U patent/JPS63159824U/ja active Pending