JPS63159821U - - Google Patents

Info

Publication number

JPS63159821U

JPS63159821U JP5362187U JP5362187U JPS63159821U JP S63159821 U JPS63159821 U JP S63159821U JP 5362187 U JP5362187 U JP 5362187U JP 5362187 U JP5362187 U JP 5362187U JP S63159821 U JPS63159821 U JP S63159821U

Authority

JP

Japan

Prior art keywords

jig

core tube

furnace core

semiconductor device

device manufacturing

Prior art date

1987-04-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims description 3
• 238000004519 manufacturing process Methods 0.000 claims 2
• 239000004065 semiconductor Substances 0.000 claims 2
• 230000005484 gravity Effects 0.000 claims 1
• 238000001816 cooling Methods 0.000 description 1

Cited By (1)