JPS63159753U - - Google Patents
Info
- Publication number
- JPS63159753U JPS63159753U JP5205987U JP5205987U JPS63159753U JP S63159753 U JPS63159753 U JP S63159753U JP 5205987 U JP5205987 U JP 5205987U JP 5205987 U JP5205987 U JP 5205987U JP S63159753 U JPS63159753 U JP S63159753U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- liquid
- pressurized gas
- valve
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 6
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims 1
Landscapes
- Optical Measuring Cells (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5205987U JPS63159753U (enExample) | 1987-04-08 | 1987-04-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5205987U JPS63159753U (enExample) | 1987-04-08 | 1987-04-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63159753U true JPS63159753U (enExample) | 1988-10-19 |
Family
ID=30876890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5205987U Pending JPS63159753U (enExample) | 1987-04-08 | 1987-04-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63159753U (enExample) |
-
1987
- 1987-04-08 JP JP5205987U patent/JPS63159753U/ja active Pending