JPS63159753U - - Google Patents

Info

Publication number
JPS63159753U
JPS63159753U JP5205987U JP5205987U JPS63159753U JP S63159753 U JPS63159753 U JP S63159753U JP 5205987 U JP5205987 U JP 5205987U JP 5205987 U JP5205987 U JP 5205987U JP S63159753 U JPS63159753 U JP S63159753U
Authority
JP
Japan
Prior art keywords
chamber
liquid
pressurized gas
valve
cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5205987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5205987U priority Critical patent/JPS63159753U/ja
Publication of JPS63159753U publication Critical patent/JPS63159753U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Optical Measuring Cells (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP5205987U 1987-04-08 1987-04-08 Pending JPS63159753U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5205987U JPS63159753U (enrdf_load_stackoverflow) 1987-04-08 1987-04-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5205987U JPS63159753U (enrdf_load_stackoverflow) 1987-04-08 1987-04-08

Publications (1)

Publication Number Publication Date
JPS63159753U true JPS63159753U (enrdf_load_stackoverflow) 1988-10-19

Family

ID=30876890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5205987U Pending JPS63159753U (enrdf_load_stackoverflow) 1987-04-08 1987-04-08

Country Status (1)

Country Link
JP (1) JPS63159753U (enrdf_load_stackoverflow)

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