JPS63158667U - - Google Patents
Info
- Publication number
- JPS63158667U JPS63158667U JP4983187U JP4983187U JPS63158667U JP S63158667 U JPS63158667 U JP S63158667U JP 4983187 U JP4983187 U JP 4983187U JP 4983187 U JP4983187 U JP 4983187U JP S63158667 U JPS63158667 U JP S63158667U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum exhaust
- seal part
- nozzle
- evacuation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008878 coupling Effects 0.000 claims 1
- 238000010168 coupling process Methods 0.000 claims 1
- 238000005859 coupling reaction Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
Landscapes
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4983187U JPS63158667U (enExample) | 1987-04-03 | 1987-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4983187U JPS63158667U (enExample) | 1987-04-03 | 1987-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63158667U true JPS63158667U (enExample) | 1988-10-18 |
Family
ID=30872648
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4983187U Pending JPS63158667U (enExample) | 1987-04-03 | 1987-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63158667U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02190691A (ja) * | 1989-01-19 | 1990-07-26 | Ulvac Corp | 真空バルブ |
-
1987
- 1987-04-03 JP JP4983187U patent/JPS63158667U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02190691A (ja) * | 1989-01-19 | 1990-07-26 | Ulvac Corp | 真空バルブ |