JPS63158667U - - Google Patents

Info

Publication number
JPS63158667U
JPS63158667U JP4983187U JP4983187U JPS63158667U JP S63158667 U JPS63158667 U JP S63158667U JP 4983187 U JP4983187 U JP 4983187U JP 4983187 U JP4983187 U JP 4983187U JP S63158667 U JPS63158667 U JP S63158667U
Authority
JP
Japan
Prior art keywords
vacuum
vacuum exhaust
seal part
nozzle
evacuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4983187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4983187U priority Critical patent/JPS63158667U/ja
Publication of JPS63158667U publication Critical patent/JPS63158667U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Details Of Valves (AREA)
JP4983187U 1987-04-03 1987-04-03 Pending JPS63158667U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4983187U JPS63158667U (enrdf_load_stackoverflow) 1987-04-03 1987-04-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4983187U JPS63158667U (enrdf_load_stackoverflow) 1987-04-03 1987-04-03

Publications (1)

Publication Number Publication Date
JPS63158667U true JPS63158667U (enrdf_load_stackoverflow) 1988-10-18

Family

ID=30872648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4983187U Pending JPS63158667U (enrdf_load_stackoverflow) 1987-04-03 1987-04-03

Country Status (1)

Country Link
JP (1) JPS63158667U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02190691A (ja) * 1989-01-19 1990-07-26 Ulvac Corp 真空バルブ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02190691A (ja) * 1989-01-19 1990-07-26 Ulvac Corp 真空バルブ

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