JPS63157965U - - Google Patents

Info

Publication number
JPS63157965U
JPS63157965U JP5104487U JP5104487U JPS63157965U JP S63157965 U JPS63157965 U JP S63157965U JP 5104487 U JP5104487 U JP 5104487U JP 5104487 U JP5104487 U JP 5104487U JP S63157965 U JPS63157965 U JP S63157965U
Authority
JP
Japan
Prior art keywords
gas
laser
guide
laser gas
discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5104487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5104487U priority Critical patent/JPS63157965U/ja
Publication of JPS63157965U publication Critical patent/JPS63157965U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Lasers (AREA)
JP5104487U 1987-04-06 1987-04-06 Pending JPS63157965U (uk)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5104487U JPS63157965U (uk) 1987-04-06 1987-04-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5104487U JPS63157965U (uk) 1987-04-06 1987-04-06

Publications (1)

Publication Number Publication Date
JPS63157965U true JPS63157965U (uk) 1988-10-17

Family

ID=30874955

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5104487U Pending JPS63157965U (uk) 1987-04-06 1987-04-06

Country Status (1)

Country Link
JP (1) JPS63157965U (uk)

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