JPS63157940U - - Google Patents
Info
- Publication number
- JPS63157940U JPS63157940U JP5151687U JP5151687U JPS63157940U JP S63157940 U JPS63157940 U JP S63157940U JP 5151687 U JP5151687 U JP 5151687U JP 5151687 U JP5151687 U JP 5151687U JP S63157940 U JPS63157940 U JP S63157940U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- positioning
- positioning device
- reference side
- chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5151687U JPS63157940U (sl) | 1987-04-03 | 1987-04-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5151687U JPS63157940U (sl) | 1987-04-03 | 1987-04-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63157940U true JPS63157940U (sl) | 1988-10-17 |
Family
ID=30875851
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5151687U Pending JPS63157940U (sl) | 1987-04-03 | 1987-04-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63157940U (sl) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61279148A (ja) * | 1985-06-04 | 1986-12-09 | Mitsubishi Electric Corp | 半導体ウエ−ハの位置決め装置 |
-
1987
- 1987-04-03 JP JP5151687U patent/JPS63157940U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61279148A (ja) * | 1985-06-04 | 1986-12-09 | Mitsubishi Electric Corp | 半導体ウエ−ハの位置決め装置 |