JPS63157938U - - Google Patents
Info
- Publication number
- JPS63157938U JPS63157938U JP1987048928U JP4892887U JPS63157938U JP S63157938 U JPS63157938 U JP S63157938U JP 1987048928 U JP1987048928 U JP 1987048928U JP 4892887 U JP4892887 U JP 4892887U JP S63157938 U JPS63157938 U JP S63157938U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer storage
- storage grooves
- push rod
- carrier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
- Pile Receivers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987048928U JPS63157938U (enExample) | 1987-04-02 | 1987-04-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987048928U JPS63157938U (enExample) | 1987-04-02 | 1987-04-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63157938U true JPS63157938U (enExample) | 1988-10-17 |
Family
ID=30870916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987048928U Pending JPS63157938U (enExample) | 1987-04-02 | 1987-04-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63157938U (enExample) |
-
1987
- 1987-04-02 JP JP1987048928U patent/JPS63157938U/ja active Pending