JPS63157926U - - Google Patents

Info

Publication number

JPS63157926U

JPS63157926U JP5247787U JP5247787U JPS63157926U JP S63157926 U JPS63157926 U JP S63157926U JP 5247787 U JP5247787 U JP 5247787U JP 5247787 U JP5247787 U JP 5247787U JP S63157926 U JPS63157926 U JP S63157926U

Authority

JP

Japan

Prior art keywords

quartz chamber

base

internal electrode

peripheral wall

semiconductor wafer

Prior art date

1987-04-06

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010453 quartz Substances 0.000 claims description 6
• 239000004065 semiconductor Substances 0.000 claims description 6
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
• 238000005530 etching Methods 0.000 claims description 3
• 238000004519 manufacturing process Methods 0.000 claims description 3
• 230000002093 peripheral effect Effects 0.000 claims description 3