JPS63156041U - - Google Patents

Info

Publication number
JPS63156041U
JPS63156041U JP4883887U JP4883887U JPS63156041U JP S63156041 U JPS63156041 U JP S63156041U JP 4883887 U JP4883887 U JP 4883887U JP 4883887 U JP4883887 U JP 4883887U JP S63156041 U JPS63156041 U JP S63156041U
Authority
JP
Japan
Prior art keywords
receiving plate
pressure receiving
substrate
electrode
convex portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4883887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4883887U priority Critical patent/JPS63156041U/ja
Publication of JPS63156041U publication Critical patent/JPS63156041U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP4883887U 1987-03-31 1987-03-31 Pending JPS63156041U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4883887U JPS63156041U (fr) 1987-03-31 1987-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4883887U JPS63156041U (fr) 1987-03-31 1987-03-31

Publications (1)

Publication Number Publication Date
JPS63156041U true JPS63156041U (fr) 1988-10-13

Family

ID=30870744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4883887U Pending JPS63156041U (fr) 1987-03-31 1987-03-31

Country Status (1)

Country Link
JP (1) JPS63156041U (fr)

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