JPS63155638U - - Google Patents
Info
- Publication number
- JPS63155638U JPS63155638U JP4927387U JP4927387U JPS63155638U JP S63155638 U JPS63155638 U JP S63155638U JP 4927387 U JP4927387 U JP 4927387U JP 4927387 U JP4927387 U JP 4927387U JP S63155638 U JPS63155638 U JP S63155638U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- ring
- wafer ring
- sheet
- holding jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4927387U JPS63155638U (enExample) | 1987-03-31 | 1987-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4927387U JPS63155638U (enExample) | 1987-03-31 | 1987-03-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63155638U true JPS63155638U (enExample) | 1988-10-12 |
Family
ID=30871569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4927387U Pending JPS63155638U (enExample) | 1987-03-31 | 1987-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63155638U (enExample) |
-
1987
- 1987-03-31 JP JP4927387U patent/JPS63155638U/ja active Pending