JPS63154663U - - Google Patents
Info
- Publication number
- JPS63154663U JPS63154663U JP4732587U JP4732587U JPS63154663U JP S63154663 U JPS63154663 U JP S63154663U JP 4732587 U JP4732587 U JP 4732587U JP 4732587 U JP4732587 U JP 4732587U JP S63154663 U JPS63154663 U JP S63154663U
- Authority
- JP
- Japan
- Prior art keywords
- sputtering target
- unevenness
- cooling plate
- joining structure
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005477 sputtering target Methods 0.000 claims description 7
- 238000001816 cooling Methods 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4732587U JPS63154663U (no) | 1987-03-30 | 1987-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4732587U JPS63154663U (no) | 1987-03-30 | 1987-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63154663U true JPS63154663U (no) | 1988-10-11 |
Family
ID=33446701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4732587U Pending JPS63154663U (no) | 1987-03-30 | 1987-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63154663U (no) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010163639A (ja) * | 2009-01-13 | 2010-07-29 | Showa Denko Kk | スパッタリング装置及びそれを用いた磁気記録媒体の製造方法 |
-
1987
- 1987-03-30 JP JP4732587U patent/JPS63154663U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010163639A (ja) * | 2009-01-13 | 2010-07-29 | Showa Denko Kk | スパッタリング装置及びそれを用いた磁気記録媒体の製造方法 |