JPS63154662U - - Google Patents

Info

Publication number
JPS63154662U
JPS63154662U JP4732487U JP4732487U JPS63154662U JP S63154662 U JPS63154662 U JP S63154662U JP 4732487 U JP4732487 U JP 4732487U JP 4732487 U JP4732487 U JP 4732487U JP S63154662 U JPS63154662 U JP S63154662U
Authority
JP
Japan
Prior art keywords
peripheral wall
cooling plate
flange
sputtering target
top plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4732487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4732487U priority Critical patent/JPS63154662U/ja
Publication of JPS63154662U publication Critical patent/JPS63154662U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP4732487U 1987-03-30 1987-03-30 Pending JPS63154662U (US06265458-20010724-C00056.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4732487U JPS63154662U (US06265458-20010724-C00056.png) 1987-03-30 1987-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4732487U JPS63154662U (US06265458-20010724-C00056.png) 1987-03-30 1987-03-30

Publications (1)

Publication Number Publication Date
JPS63154662U true JPS63154662U (US06265458-20010724-C00056.png) 1988-10-11

Family

ID=30867822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4732487U Pending JPS63154662U (US06265458-20010724-C00056.png) 1987-03-30 1987-03-30

Country Status (1)

Country Link
JP (1) JPS63154662U (US06265458-20010724-C00056.png)

Similar Documents

Publication Publication Date Title
JPS63154662U (US06265458-20010724-C00056.png)
JPS62133019U (US06265458-20010724-C00056.png)
JPS62130499U (US06265458-20010724-C00056.png)
JPH02114749U (US06265458-20010724-C00056.png)
JPS62134823U (US06265458-20010724-C00056.png)
JPS64724U (US06265458-20010724-C00056.png)
JPS62183313U (US06265458-20010724-C00056.png)
JPS6164279U (US06265458-20010724-C00056.png)
JPS61179972U (US06265458-20010724-C00056.png)
JPS63143219U (US06265458-20010724-C00056.png)
JPH0366545U (US06265458-20010724-C00056.png)
JPH0211157U (US06265458-20010724-C00056.png)
JPH01151773U (US06265458-20010724-C00056.png)
JPS6411132U (US06265458-20010724-C00056.png)
JPS6159201U (US06265458-20010724-C00056.png)
JPS61186555U (US06265458-20010724-C00056.png)
JPH0432315U (US06265458-20010724-C00056.png)
JPS61164156U (US06265458-20010724-C00056.png)
JPS6362643U (US06265458-20010724-C00056.png)
JPS63183916U (US06265458-20010724-C00056.png)
JPS63199161U (US06265458-20010724-C00056.png)
JPS61141246U (US06265458-20010724-C00056.png)
JPS61161246U (US06265458-20010724-C00056.png)
JPS62155610U (US06265458-20010724-C00056.png)
JPH0358856U (US06265458-20010724-C00056.png)