JPS63153748A - Ferroelectric storage device - Google Patents
Ferroelectric storage deviceInfo
- Publication number
- JPS63153748A JPS63153748A JP61301946A JP30194686A JPS63153748A JP S63153748 A JPS63153748 A JP S63153748A JP 61301946 A JP61301946 A JP 61301946A JP 30194686 A JP30194686 A JP 30194686A JP S63153748 A JPS63153748 A JP S63153748A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- selection circuit
- electrodes
- electrode
- storage section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 claims abstract description 24
- 230000007423 decrease Effects 0.000 abstract description 7
- 239000010408 film Substances 0.000 abstract 1
- 230000005684 electric field Effects 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- BQCIDUSAKPWEOX-UHFFFAOYSA-N 1,1-Difluoroethene Chemical compound FC(F)=C BQCIDUSAKPWEOX-UHFFFAOYSA-N 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は強誘電性高分子薄膜を用いる記憶装置に関する
。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a memory device using a ferroelectric polymer thin film.
(従来の技術)
第4図に示されるように、強誘電性記憶装置の情報記憶
部分は、2枚の電極1,2に挟まれた強誘電体薄膜3か
らなっており、この強誘電性記憶装置の記憶の消去、書
き込み、読み出しは以下のようにして行われる。(Prior Art) As shown in FIG. 4, the information storage part of a ferroelectric memory device consists of a ferroelectric thin film 3 sandwiched between two electrodes 1 and 2. Erasing, writing, and reading data in a storage device are performed as follows.
i)消去:第5a図に示されるように、電源4によって
強誘電体薄膜3の抗電界より大きい電界を強誘電体薄膜
3に加え、薄膜の分極を一方向に揃える。i) Erasing: As shown in FIG. 5a, an electric field larger than the coercive field of the ferroelectric thin film 3 is applied to the ferroelectric thin film 3 by the power source 4 to align the polarization of the thin film in one direction.
ii)書き込み:第5b図に示されるように、消去時と
逆極性の抗電界以下の電界を薄膜3に加えながらレーザ
ー光5で薄膜3を局部的に加熱する。ii) Writing: As shown in FIG. 5b, the thin film 3 is locally heated with the laser beam 5 while applying an electric field below the coercive electric field of opposite polarity to that during erasing to the thin film 3.
温度上昇による抗電界の減少により照射部分のみの分極
が反転する。As the coercive electric field decreases due to temperature rise, the polarization of only the irradiated area is reversed.
iii > 読み出し:第5c図に示されるように、不
可逆な分極変化が生じない程度の弱いレーザー光スポッ
ト5で薄膜3表面を走査し、照射点の焦電電流を電流ア
ンプ6およびそれにつながる信号処理システム7で検出
して分極の極性を読み取る。iii > Readout: As shown in Fig. 5c, the surface of the thin film 3 is scanned with a laser beam spot 5 weak enough not to cause an irreversible polarization change, and the pyroelectric current at the irradiation point is transmitted to the current amplifier 6 and the signal processing connected thereto. The system 7 detects and reads the polarity of polarization.
強誘電体薄膜3としてはフッ化ビニリデン・三フッ化エ
チレン共重合からなるものを用いることができる。The ferroelectric thin film 3 may be made of vinylidene fluoride/ethylene trifluoride copolymer.
(発明が解決しようとする問題点)
メモリー素子として用いられる厚さ1μmの薄膜は1c
留当たり約20nFの静電容量を持っている。大容量メ
モリーを構成するため大面積化するとそれに比例して静
電容量が増加しインピーダンスが低下する。情報検出用
の電流アンプは一般に入力端のインピーダンスが低下す
るとノイズの増加と不安定を生じることになる。(Problem to be solved by the invention) A thin film with a thickness of 1 μm used as a memory element is 1 c
It has a capacitance of about 20 nF per station. When the area is increased to configure a large capacity memory, the capacitance increases proportionally and the impedance decreases. In general, when the impedance at the input terminal of a current amplifier for information detection decreases, noise increases and instability occurs.
(問題点を解決するための手段)
上述された問題点は、
強誘電体薄膜からなる情報記憶部、およびこの情報記憶
部の内読み出し操作が行われている部分を、読み出し信
号増幅器に選択して接続する切り替え手段を備えて成る
強誘電性記憶装置によって解決される。(Means for solving the problem) The above problem is solved by selecting the information storage section made of a ferroelectric thin film and the part of this information storage section where the readout operation is performed as the readout signal amplifier. The problem is solved by a ferroelectric memory device comprising a switching means for connecting the two.
(作用および効果)
強誘電体薄膜からなる情報記憶部の内、読み出し操作が
行われている情報記憶部の部分が選択的に信号増幅器に
接続されるので、大容量化したことによる信号増幅器の
入力インピーダンスの低下を防ぐことができ、大容量化
にともなうノイズの増加と不安定さを避けることができ
る。(Functions and Effects) Of the information storage section made of a ferroelectric thin film, the part of the information storage section where the reading operation is performed is selectively connected to the signal amplifier, so the signal amplifier's capacity increases due to the increased capacity. It is possible to prevent a decrease in input impedance, and it is possible to avoid an increase in noise and instability that accompanies an increase in capacity.
(実施例1)
以下、本発明を実施例に基づいて詳細に説明する。第1
A図および第1B図は本発明の第1実施例のそれぞれ平
面図および断面図である。ディスク支持体10が軸11
によって回転される。このディスク支持体10には上部
電極1と下部電極2との間に挟まれた強誘電体薄膜3が
設けられている。上部電極1a、lb、lcは互いに電
気的に分けられており、各々半径方向内側に設けられた
選択回路12a、12b、12cを介して共通電極13
に接続されている。選択回路12a、12b。(Example 1) Hereinafter, the present invention will be described in detail based on Examples. 1st
Figures A and 1B are a plan view and a sectional view, respectively, of a first embodiment of the present invention. The disk support 10 is the shaft 11
rotated by This disk support 10 is provided with a ferroelectric thin film 3 sandwiched between an upper electrode 1 and a lower electrode 2. The upper electrodes 1a, lb, and lc are electrically separated from each other, and are connected to the common electrode 13 via selection circuits 12a, 12b, and 12c provided radially inside, respectively.
It is connected to the. Selection circuits 12a, 12b.
12Cは光導電体或いは光制御型薄膜トランジスタのよ
うな光によってゲートのオンオフを行う素子によって構
成される。書き込み読み出し用レーザー光スポット5と
選択回路駆動用レーザー光14がディスク支持体100
牢径方向に並んでいる。書き込み読み出し用レーザー光
スポット5はデータ書き込み読み出し時に半径方向に移
動して、情報記憶部の一つの部分に半径方向に沿って複
数個の情報の記録続出を行えるようになっている。12C is constituted by an element whose gate is turned on and off by light, such as a photoconductor or a light-controlled thin film transistor. A laser beam spot 5 for writing and reading and a laser beam 14 for driving a selection circuit are attached to a disk support 100.
They are lined up in the radial direction. The writing/reading laser beam spot 5 moves in the radial direction when writing/reading data, so that a plurality of pieces of information can be successively recorded along the radial direction in one part of the information storage section.
上部電極1bを有する部分の情報記憶部に書き込み読み
出し用レーザー光スポット5が照射される時、選択用回
路駆動用レーザー光14が選択回路12bに位置してこ
れを照射し、情報を読み取っている情報記憶部の上部電
極1bが共通電極13に電気的に接続される。共通電極
13は接触子15を介して電流アンプと接続されており
、情報の検出が行われる。When the write/read laser beam spot 5 is irradiated on the information storage section having the upper electrode 1b, the selection circuit driving laser beam 14 is located on the selection circuit 12b and irradiates it to read information. The upper electrode 1b of the information storage section is electrically connected to the common electrode 13. The common electrode 13 is connected to a current amplifier via a contactor 15, and information is detected.
このようにして記憶素子のインピーダンスを電極の分割
数倍に増加させることができる。In this way, the impedance of the memory element can be increased by the number of electrode divisions.
(実施例2)
第2A図および第2B図は本発明の第2実施例の断面図
および平面図である。カード状の支持体10には下部電
極2と複数の上部電極1a、1blc、ldとに挟まれ
た強誘電体薄膜3が設置されている。上部電極la、l
b、 lc、ldはそれぞれ選択回路12a、12b
、12C,12dを介して共通電極13に接続されてい
る。選択回路12a、12b、12c 、12dは光照
射によって導通状態になる光導電体或いは光制御型薄膜
トランジスタ等である。上部電極1aを備える部分の情
報記憶部に記憶されている情報を読み出す場合は、選択
回路12aに選択回路駆動用のレーザー光14を照射し
て上部電極1aを共通電極13に接続する。この時上部
電極1a以外の上部電極は共通電極13から切り離され
ているので、インピーダンスの低下が避けられる。図示
されるように複数個の情報記憶部と選択回路とが平行に
並べられていると、第2B図中に示される矢印方向にカ
ード全体を移動した際に、上部電極1aの位置に読み出
し用レーザー光スポット10が照射される場合は、選択
回路駆動用レーザー光14が選択回路12aを照射し、
上部電極1bの位置に読み出し用レーザー光スポット5
が照射される場合は、選択回路駆動レーザー光14が選
択回路12bを照射することになり、電極切り替えのた
めの信号を特に外部から与える必要はない。(Embodiment 2) FIGS. 2A and 2B are a sectional view and a plan view of a second embodiment of the present invention. A ferroelectric thin film 3 sandwiched between a lower electrode 2 and a plurality of upper electrodes 1a, 1blc, and ld is provided on a card-shaped support 10. Upper electrode la, l
b, lc, and ld are selection circuits 12a and 12b, respectively.
, 12C, and 12d to the common electrode 13. The selection circuits 12a, 12b, 12c, and 12d are photoconductors or light-controlled thin film transistors that become conductive when irradiated with light. When reading out information stored in the information storage portion of the portion including the upper electrode 1a, the upper electrode 1a is connected to the common electrode 13 by irradiating the selection circuit 12a with a laser beam 14 for driving the selection circuit. At this time, since the upper electrodes other than the upper electrode 1a are separated from the common electrode 13, a decrease in impedance can be avoided. If a plurality of information storage sections and selection circuits are arranged in parallel as shown in the figure, when the entire card is moved in the direction of the arrow shown in FIG. When the laser beam spot 10 is irradiated, the selection circuit driving laser beam 14 irradiates the selection circuit 12a,
A reading laser beam spot 5 is placed at the position of the upper electrode 1b.
When the selection circuit driving laser beam 14 is irradiated with the selection circuit 12b, the selection circuit 12b is irradiated with the selection circuit 12b, and there is no need to apply a signal for switching the electrodes from the outside.
なお、上述した第1および第2実施例において、光制御
による選択回路12を用いる他に、読み出しの行われて
いる情報記憶部の上部電極1aに接触子15を選択的に
接触させる切り替え手段を用いることもできる。In addition, in the first and second embodiments described above, in addition to using the selection circuit 12 based on optical control, a switching means for selectively bringing the contact 15 into contact with the upper electrode 1a of the information storage section that is being read is used. It can also be used.
(実施例3) 第3図は本発明の第3実施例の側断面図である。(Example 3) FIG. 3 is a side sectional view of a third embodiment of the invention.
本実施例においては、支持体10、下部電極2、選択回
路(光導電体)12、中間電極16a。In this embodiment, the support body 10, the lower electrode 2, the selection circuit (photoconductor) 12, and the intermediate electrode 16a.
16b、16c、16d、強誘電体薄膜3、上部電極1
がこの順で積層されている。中間電極16a、16b、
16c、16dは互いに電気的に分割されている。読み
出しの際には、上部より書き込み読み出し用レーザー光
スポット5を照射し、読み出しを行っている領域の下部
より選択用レーザー光14を照射する。この選択用ビー
ムにより選択回路(光導電体)12が導通し中間電極1
6a・と下部電極2との間のインピーダンスが下がりそ
の部分のみが選択される。中間電極16a。16b, 16c, 16d, ferroelectric thin film 3, upper electrode 1
are stacked in this order. Intermediate electrodes 16a, 16b,
16c and 16d are electrically separated from each other. During reading, a laser beam spot 5 for writing and reading is irradiated from above, and a laser beam 14 for selection is irradiated from the bottom of the area being read. This selection beam causes the selection circuit (photoconductor) 12 to conduct and the intermediate electrode 1
The impedance between the electrode 6a and the lower electrode 2 decreases, and only that portion is selected. Intermediate electrode 16a.
16b、16C,16dを除去した状態においても、選
択用レーザー光14が照射された位置の強誘電体薄膜3
の端面のみが下部電極2に電気的に接続されるので、中
間電極16a、16b、16C。Even in the state where 16b, 16C, and 16d are removed, the ferroelectric thin film 3 at the position irradiated with the selection laser beam 14
Since only the end faces of the intermediate electrodes 16a, 16b, 16C are electrically connected to the lower electrode 2.
16dは原理的には必要ないが、光導電体の一部に電流
が集中しインピーダンスの増加をまねき、書き込み読み
出しが完全に行われない。この中間電極を設けることに
より、下部電極2とのインピーダンスが低下し、書き込
み読み出しが完全に行われるようになる。また、支持体
10と下部電極2とは透明であることが必要である。16d is not necessary in principle, but current concentrates on a part of the photoconductor, causing an increase in impedance, and writing and reading cannot be performed completely. By providing this intermediate electrode, the impedance with the lower electrode 2 is reduced, and writing and reading can be performed perfectly. Further, the support 10 and the lower electrode 2 need to be transparent.
なお、上記各実施例において、上部電極は透明にして強
誘電体薄膜そのものにレーザー光を吸収させ熱に変換さ
せてもよいし、不透明な上部電極に熱を吸収させて間接
的に強誘電体薄膜を加熱してもよい。また、選択用レー
ザー光の照射は読み出し書き込み用レーザー光スポット
の照射より先行させ導通の時間的な遅れを補償するよう
にするのが好ましい。In each of the above embodiments, the upper electrode may be made transparent so that the ferroelectric thin film itself absorbs the laser light and converts it into heat, or the opaque upper electrode may absorb heat and indirectly convert the ferroelectric thin film into heat. The thin film may also be heated. Further, it is preferable that the irradiation of the selection laser beam precedes the irradiation of the read/write laser beam spot to compensate for the time delay in conduction.
第1A図および第1B図はそれぞれ本発明の第1実施例
の平面図および断面図、
第2A図および第2B図はそれぞれ本発明の第2実施例
の平面図および断面図、
第3図は本発明の第3実施例の側断面図、第4図は従来
の強誘電体記憶装置の基本構成を示す断面図、
第5A図、第5B図および第5C図はそれぞれ強誘電体
記憶装置の消去、書き込みおよび読み出しの基本的な操
作を説明する図。
1.1 a、1 b、l C−−・・・・上部電極、2
・・・・・・下B電極、 3・・・・・・強誘電体薄膜
、4・・・・・・電源、
5・・・・・・書き込み読み出し用レーザー光スポット
、6・・・・・・電流アンプ、 7・・・・・・信号処
理システム、10・・・・・・支持体、 11・・・
・・・軸、12.12a、12b、12c、12d−−
−−−−選択回路、 13・・・・・・共通電極、1
4・・・・・・選択回路駆動用レーザー光、15・・・
・・・接触子、
16a、16b、16c、16d・−・−・中間電極。
第1A図
第1B図
第2A図
第2B図
移動方向1A and 1B are a plan view and a sectional view, respectively, of a first embodiment of the present invention, FIG. 2A and 2B are a plan view and a sectional view, respectively, of a second embodiment of the present invention, and FIG. 3 is a plan view and a sectional view, respectively, of a second embodiment of the present invention. 4 is a sectional view showing the basic configuration of a conventional ferroelectric memory device, and FIGS. 5A, 5B, and 5C are respectively a side sectional view of a third embodiment of the present invention. A diagram explaining basic operations of erasing, writing, and reading. 1.1 a, 1 b, l C---...upper electrode, 2
... lower B electrode, 3 ... ferroelectric thin film, 4 ... power supply, 5 ... laser beam spot for writing and reading, 6 ... ...Current amplifier, 7...Signal processing system, 10...Support, 11...
... Axis, 12.12a, 12b, 12c, 12d--
---Selection circuit, 13...Common electrode, 1
4... Laser light for driving selection circuit, 15...
...Contactor, 16a, 16b, 16c, 16d...Intermediate electrode. Figure 1A Figure 1B Figure 2A Figure 2B Movement direction
Claims (1)
部の内読み出し操作が行われている部分を、読み出し信
号増幅器に選択して接続する切り替え手段を備えて成る
強誘電性記憶装置。A ferroelectric storage device comprising an information storage section made of a ferroelectric thin film, and switching means for selectively connecting a portion of the information storage section where a read operation is being performed to a read signal amplifier.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61301946A JP2588394B2 (en) | 1986-12-18 | 1986-12-18 | Ferroelectric storage device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61301946A JP2588394B2 (en) | 1986-12-18 | 1986-12-18 | Ferroelectric storage device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63153748A true JPS63153748A (en) | 1988-06-27 |
JP2588394B2 JP2588394B2 (en) | 1997-03-05 |
Family
ID=17903013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61301946A Expired - Lifetime JP2588394B2 (en) | 1986-12-18 | 1986-12-18 | Ferroelectric storage device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2588394B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0381158A2 (en) * | 1989-02-02 | 1990-08-08 | Olympus Optical Co., Ltd. | Memory device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62183093A (en) * | 1986-02-06 | 1987-08-11 | Sony Corp | Recording and reproducing device |
-
1986
- 1986-12-18 JP JP61301946A patent/JP2588394B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62183093A (en) * | 1986-02-06 | 1987-08-11 | Sony Corp | Recording and reproducing device |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0381158A2 (en) * | 1989-02-02 | 1990-08-08 | Olympus Optical Co., Ltd. | Memory device |
Also Published As
Publication number | Publication date |
---|---|
JP2588394B2 (en) | 1997-03-05 |
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