JPS63153538U - - Google Patents
Info
- Publication number
- JPS63153538U JPS63153538U JP4849087U JP4849087U JPS63153538U JP S63153538 U JPS63153538 U JP S63153538U JP 4849087 U JP4849087 U JP 4849087U JP 4849087 U JP4849087 U JP 4849087U JP S63153538 U JPS63153538 U JP S63153538U
- Authority
- JP
- Japan
- Prior art keywords
- electrostatic adsorption
- rotation axis
- adsorption part
- lead wire
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001179 sorption measurement Methods 0.000 claims description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical group [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4849087U JPH0528774Y2 (en:Method) | 1987-03-30 | 1987-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4849087U JPH0528774Y2 (en:Method) | 1987-03-30 | 1987-03-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63153538U true JPS63153538U (en:Method) | 1988-10-07 |
| JPH0528774Y2 JPH0528774Y2 (en:Method) | 1993-07-23 |
Family
ID=30870067
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4849087U Expired - Lifetime JPH0528774Y2 (en:Method) | 1987-03-30 | 1987-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0528774Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009235429A (ja) * | 2008-03-25 | 2009-10-15 | Iwate Univ | スパッタ装置 |
-
1987
- 1987-03-30 JP JP4849087U patent/JPH0528774Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009235429A (ja) * | 2008-03-25 | 2009-10-15 | Iwate Univ | スパッタ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0528774Y2 (en:Method) | 1993-07-23 |