JPS63153518U - - Google Patents
Info
- Publication number
- JPS63153518U JPS63153518U JP4640187U JP4640187U JPS63153518U JP S63153518 U JPS63153518 U JP S63153518U JP 4640187 U JP4640187 U JP 4640187U JP 4640187 U JP4640187 U JP 4640187U JP S63153518 U JPS63153518 U JP S63153518U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- drive shaft
- driven shaft
- drive
- support arm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 10
- 238000010586 diagram Methods 0.000 description 2
- 238000007738 vacuum evaporation Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4640187U JPS63153518U (en:Method) | 1987-03-27 | 1987-03-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4640187U JPS63153518U (en:Method) | 1987-03-27 | 1987-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63153518U true JPS63153518U (en:Method) | 1988-10-07 |
Family
ID=30866030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4640187U Pending JPS63153518U (en:Method) | 1987-03-27 | 1987-03-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63153518U (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2540860A3 (en) * | 2011-06-27 | 2015-03-04 | United Technologies Corporation | Planetary manipulator for PVD coating system |
-
1987
- 1987-03-27 JP JP4640187U patent/JPS63153518U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2540860A3 (en) * | 2011-06-27 | 2015-03-04 | United Technologies Corporation | Planetary manipulator for PVD coating system |
| US9109289B2 (en) | 2011-06-27 | 2015-08-18 | United Technologies Corporation | Manipulator for coating application |