JPS6315050U - - Google Patents

Info

Publication number
JPS6315050U
JPS6315050U JP10787786U JP10787786U JPS6315050U JP S6315050 U JPS6315050 U JP S6315050U JP 10787786 U JP10787786 U JP 10787786U JP 10787786 U JP10787786 U JP 10787786U JP S6315050 U JPS6315050 U JP S6315050U
Authority
JP
Japan
Prior art keywords
drive shaft
rotation
shaft
drive
rotary disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10787786U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10787786U priority Critical patent/JPS6315050U/ja
Publication of JPS6315050U publication Critical patent/JPS6315050U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP10787786U 1986-07-14 1986-07-14 Pending JPS6315050U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10787786U JPS6315050U (enrdf_load_stackoverflow) 1986-07-14 1986-07-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10787786U JPS6315050U (enrdf_load_stackoverflow) 1986-07-14 1986-07-14

Publications (1)

Publication Number Publication Date
JPS6315050U true JPS6315050U (enrdf_load_stackoverflow) 1988-02-01

Family

ID=30984558

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10787786U Pending JPS6315050U (enrdf_load_stackoverflow) 1986-07-14 1986-07-14

Country Status (1)

Country Link
JP (1) JPS6315050U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0346742A (ja) * 1989-07-13 1991-02-28 Nissin Electric Co Ltd イオン注入装置の制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0346742A (ja) * 1989-07-13 1991-02-28 Nissin Electric Co Ltd イオン注入装置の制御方法

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