JPS6315050U - - Google Patents
Info
- Publication number
- JPS6315050U JPS6315050U JP10787786U JP10787786U JPS6315050U JP S6315050 U JPS6315050 U JP S6315050U JP 10787786 U JP10787786 U JP 10787786U JP 10787786 U JP10787786 U JP 10787786U JP S6315050 U JPS6315050 U JP S6315050U
- Authority
- JP
- Japan
- Prior art keywords
- drive shaft
- rotation
- shaft
- drive
- rotary disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005540 biological transmission Effects 0.000 claims description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10787786U JPS6315050U (cs) | 1986-07-14 | 1986-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10787786U JPS6315050U (cs) | 1986-07-14 | 1986-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6315050U true JPS6315050U (cs) | 1988-02-01 |
Family
ID=30984558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10787786U Pending JPS6315050U (cs) | 1986-07-14 | 1986-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6315050U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0346742A (ja) * | 1989-07-13 | 1991-02-28 | Nissin Electric Co Ltd | イオン注入装置の制御方法 |
-
1986
- 1986-07-14 JP JP10787786U patent/JPS6315050U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0346742A (ja) * | 1989-07-13 | 1991-02-28 | Nissin Electric Co Ltd | イオン注入装置の制御方法 |