JPS6315049U - - Google Patents
Info
- Publication number
- JPS6315049U JPS6315049U JP10807986U JP10807986U JPS6315049U JP S6315049 U JPS6315049 U JP S6315049U JP 10807986 U JP10807986 U JP 10807986U JP 10807986 U JP10807986 U JP 10807986U JP S6315049 U JPS6315049 U JP S6315049U
- Authority
- JP
- Japan
- Prior art keywords
- film
- wafer
- circular
- sucking
- holds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10807986U JPS6315049U (en, 2012) | 1986-07-16 | 1986-07-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10807986U JPS6315049U (en, 2012) | 1986-07-16 | 1986-07-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6315049U true JPS6315049U (en, 2012) | 1988-02-01 |
Family
ID=30984943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10807986U Pending JPS6315049U (en, 2012) | 1986-07-16 | 1986-07-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6315049U (en, 2012) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0537606U (ja) * | 1991-10-28 | 1993-05-21 | ダイハツ工業株式会社 | 自動車用グリルの取付構造 |
| JP2006281434A (ja) * | 2005-03-11 | 2006-10-19 | Disco Abrasive Syst Ltd | ウェーハの保持機構 |
-
1986
- 1986-07-16 JP JP10807986U patent/JPS6315049U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0537606U (ja) * | 1991-10-28 | 1993-05-21 | ダイハツ工業株式会社 | 自動車用グリルの取付構造 |
| JP2006281434A (ja) * | 2005-03-11 | 2006-10-19 | Disco Abrasive Syst Ltd | ウェーハの保持機構 |