JPS63150364U - - Google Patents

Info

Publication number
JPS63150364U
JPS63150364U JP4237787U JP4237787U JPS63150364U JP S63150364 U JPS63150364 U JP S63150364U JP 4237787 U JP4237787 U JP 4237787U JP 4237787 U JP4237787 U JP 4237787U JP S63150364 U JPS63150364 U JP S63150364U
Authority
JP
Japan
Prior art keywords
space
ion
electrode
communication path
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4237787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4237787U priority Critical patent/JPS63150364U/ja
Publication of JPS63150364U publication Critical patent/JPS63150364U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP4237787U 1987-03-23 1987-03-23 Pending JPS63150364U (sl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4237787U JPS63150364U (sl) 1987-03-23 1987-03-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4237787U JPS63150364U (sl) 1987-03-23 1987-03-23

Publications (1)

Publication Number Publication Date
JPS63150364U true JPS63150364U (sl) 1988-10-04

Family

ID=30858228

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4237787U Pending JPS63150364U (sl) 1987-03-23 1987-03-23

Country Status (1)

Country Link
JP (1) JPS63150364U (sl)

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