JPS63149963U - - Google Patents

Info

Publication number
JPS63149963U
JPS63149963U JP4214987U JP4214987U JPS63149963U JP S63149963 U JPS63149963 U JP S63149963U JP 4214987 U JP4214987 U JP 4214987U JP 4214987 U JP4214987 U JP 4214987U JP S63149963 U JPS63149963 U JP S63149963U
Authority
JP
Japan
Prior art keywords
holes
concave
utility
scope
registration request
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4214987U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4214987U priority Critical patent/JPS63149963U/ja
Publication of JPS63149963U publication Critical patent/JPS63149963U/ja
Pending legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は本考案に係るキヤリアパレツトの正面図
で、2……孔、3……ヘソ部。
The drawing is a front view of the carrier pallet according to the present invention, showing 2...holes, 3...navel part.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] デイスク装着用の孔を複数個形成し、これら孔
間に凹又は凸状のヘソ部を配設して成るキヤリア
パレツト。
A carrier pallet that has a plurality of holes for mounting disks and a concave or convex navel portion between these holes.
JP4214987U 1987-03-24 1987-03-24 Pending JPS63149963U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4214987U JPS63149963U (en) 1987-03-24 1987-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4214987U JPS63149963U (en) 1987-03-24 1987-03-24

Publications (1)

Publication Number Publication Date
JPS63149963U true JPS63149963U (en) 1988-10-03

Family

ID=30857791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4214987U Pending JPS63149963U (en) 1987-03-24 1987-03-24

Country Status (1)

Country Link
JP (1) JPS63149963U (en)

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