JPS63149535U - - Google Patents

Info

Publication number
JPS63149535U
JPS63149535U JP4201587U JP4201587U JPS63149535U JP S63149535 U JPS63149535 U JP S63149535U JP 4201587 U JP4201587 U JP 4201587U JP 4201587 U JP4201587 U JP 4201587U JP S63149535 U JPS63149535 U JP S63149535U
Authority
JP
Japan
Prior art keywords
handle
handles
outer frame
clamping pieces
wafer carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4201587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4201587U priority Critical patent/JPS63149535U/ja
Publication of JPS63149535U publication Critical patent/JPS63149535U/ja
Pending legal-status Critical Current

Links

JP4201587U 1987-03-24 1987-03-24 Pending JPS63149535U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4201587U JPS63149535U (enrdf_load_stackoverflow) 1987-03-24 1987-03-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4201587U JPS63149535U (enrdf_load_stackoverflow) 1987-03-24 1987-03-24

Publications (1)

Publication Number Publication Date
JPS63149535U true JPS63149535U (enrdf_load_stackoverflow) 1988-10-03

Family

ID=30857539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4201587U Pending JPS63149535U (enrdf_load_stackoverflow) 1987-03-24 1987-03-24

Country Status (1)

Country Link
JP (1) JPS63149535U (enrdf_load_stackoverflow)

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