JPS63149532U - - Google Patents
Info
- Publication number
- JPS63149532U JPS63149532U JP4113187U JP4113187U JPS63149532U JP S63149532 U JPS63149532 U JP S63149532U JP 4113187 U JP4113187 U JP 4113187U JP 4113187 U JP4113187 U JP 4113187U JP S63149532 U JPS63149532 U JP S63149532U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- measurement probe
- electrode
- contact body
- electrically contacts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000523 sample Substances 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4113187U JPS63149532U (OSRAM) | 1987-03-20 | 1987-03-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4113187U JPS63149532U (OSRAM) | 1987-03-20 | 1987-03-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63149532U true JPS63149532U (OSRAM) | 1988-10-03 |
Family
ID=30855847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4113187U Pending JPS63149532U (OSRAM) | 1987-03-20 | 1987-03-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63149532U (OSRAM) |
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1987
- 1987-03-20 JP JP4113187U patent/JPS63149532U/ja active Pending