JPS63149523U - - Google Patents

Info

Publication number

JPS63149523U

JPS63149523U JP4310987U JP4310987U JPS63149523U JP S63149523 U JPS63149523 U JP S63149523U JP 4310987 U JP4310987 U JP 4310987U JP 4310987 U JP4310987 U JP 4310987U JP S63149523 U JPS63149523 U JP S63149523U

Authority

JP

Japan

Prior art keywords

furnace core

core tube

houses

auxiliary

tube body

Prior art date

1987-03-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 2
• 238000010438 heat treatment Methods 0.000 description 4
• 238000010586 diagram Methods 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1
• 238000002791 soaking Methods 0.000 description 1