JPS63149227U - - Google Patents
Info
- Publication number
- JPS63149227U JPS63149227U JP3848287U JP3848287U JPS63149227U JP S63149227 U JPS63149227 U JP S63149227U JP 3848287 U JP3848287 U JP 3848287U JP 3848287 U JP3848287 U JP 3848287U JP S63149227 U JPS63149227 U JP S63149227U
- Authority
- JP
- Japan
- Prior art keywords
- bellows
- vacuum
- vacuum container
- rod
- drive device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3848287U JPS63149227U (enExample) | 1987-03-18 | 1987-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3848287U JPS63149227U (enExample) | 1987-03-18 | 1987-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63149227U true JPS63149227U (enExample) | 1988-09-30 |
Family
ID=30850772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3848287U Pending JPS63149227U (enExample) | 1987-03-18 | 1987-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63149227U (enExample) |
-
1987
- 1987-03-18 JP JP3848287U patent/JPS63149227U/ja active Pending