JPS63149227U - - Google Patents

Info

Publication number
JPS63149227U
JPS63149227U JP3848287U JP3848287U JPS63149227U JP S63149227 U JPS63149227 U JP S63149227U JP 3848287 U JP3848287 U JP 3848287U JP 3848287 U JP3848287 U JP 3848287U JP S63149227 U JPS63149227 U JP S63149227U
Authority
JP
Japan
Prior art keywords
bellows
vacuum
vacuum container
rod
drive device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3848287U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3848287U priority Critical patent/JPS63149227U/ja
Publication of JPS63149227U publication Critical patent/JPS63149227U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP3848287U 1987-03-18 1987-03-18 Pending JPS63149227U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3848287U JPS63149227U (enrdf_load_stackoverflow) 1987-03-18 1987-03-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3848287U JPS63149227U (enrdf_load_stackoverflow) 1987-03-18 1987-03-18

Publications (1)

Publication Number Publication Date
JPS63149227U true JPS63149227U (enrdf_load_stackoverflow) 1988-09-30

Family

ID=30850772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3848287U Pending JPS63149227U (enrdf_load_stackoverflow) 1987-03-18 1987-03-18

Country Status (1)

Country Link
JP (1) JPS63149227U (enrdf_load_stackoverflow)

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