JPS6314893U - - Google Patents
Info
- Publication number
- JPS6314893U JPS6314893U JP10728586U JP10728586U JPS6314893U JP S6314893 U JPS6314893 U JP S6314893U JP 10728586 U JP10728586 U JP 10728586U JP 10728586 U JP10728586 U JP 10728586U JP S6314893 U JPS6314893 U JP S6314893U
- Authority
- JP
- Japan
- Prior art keywords
- rotor blade
- rotating shaft
- turbo
- large number
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10728586U JPS6314893U (US06653308-20031125-C00199.png) | 1986-07-11 | 1986-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10728586U JPS6314893U (US06653308-20031125-C00199.png) | 1986-07-11 | 1986-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6314893U true JPS6314893U (US06653308-20031125-C00199.png) | 1988-01-30 |
Family
ID=30983426
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10728586U Pending JPS6314893U (US06653308-20031125-C00199.png) | 1986-07-11 | 1986-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6314893U (US06653308-20031125-C00199.png) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007004542A1 (ja) * | 2005-07-01 | 2007-01-11 | Boc Edwards Japan Limited | ターボ分子ポンプ |
| JP2011510201A (ja) * | 2008-01-15 | 2011-03-31 | オーリコン レイボルド バキューム ゲーエムベーハー | ターボ分子ポンプ |
| EP2863063B1 (de) * | 2013-10-15 | 2019-12-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
-
1986
- 1986-07-11 JP JP10728586U patent/JPS6314893U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007004542A1 (ja) * | 2005-07-01 | 2007-01-11 | Boc Edwards Japan Limited | ターボ分子ポンプ |
| JP2011510201A (ja) * | 2008-01-15 | 2011-03-31 | オーリコン レイボルド バキューム ゲーエムベーハー | ターボ分子ポンプ |
| EP2863063B1 (de) * | 2013-10-15 | 2019-12-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
