JPS6314891B2 - - Google Patents
Info
- Publication number
- JPS6314891B2 JPS6314891B2 JP3193181A JP3193181A JPS6314891B2 JP S6314891 B2 JPS6314891 B2 JP S6314891B2 JP 3193181 A JP3193181 A JP 3193181A JP 3193181 A JP3193181 A JP 3193181A JP S6314891 B2 JPS6314891 B2 JP S6314891B2
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- strain
- force
- assembly
- stress concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006243 chemical reaction Methods 0.000 claims description 24
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 230000005540 biological transmission Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2206—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports
- G01L1/2231—Special supports with preselected places to mount the resistance strain gauges; Mounting of supports the supports being disc- or ring-shaped, adapted for measuring a force along a single direction
Description
【発明の詳細な説明】
本発明は、圧力または荷重を受けて変位し、こ
れを力に変換するダイヤフラムと、このダイヤフ
ラムに生じた力が機械的に伝達されて変形を生じ
この変形部に添着されたひずみゲージによつて該
力を電気信号に変換する起歪体とからなる信号変
換器における組立体に関する。Detailed Description of the Invention The present invention provides a diaphragm that is displaced in response to pressure or load and converts it into force, and a diaphragm that is mechanically transmitted to the diaphragm to cause deformation and attach to the deformed portion. The present invention relates to an assembly in a signal converter comprising a strain gauge that converts the force into an electric signal using a strain gauge.
従来、この種の信号変換器のダイヤフラムと起
歪体の組立体は第１図ａ，ｂに示すように、周縁
部において支持された円板状のダイヤフラム１
と、両端部が剛体として機能するブロツク状をな
し一端部において支持され他端部が屈曲形成され
るとともに中間部が帯板状に形成されこの帯板状
部分の剛体部分との連結部近傍の背面に検出部を
対応させてひずみゲージ２が添着された起歪体と
してのカンチレバー３と、前記ダイヤフラム１の
中心部の変位を受けてこの変位に応じた力をカン
チレバー３の前記他端部に伝達する伝達棒４とで
構成されていた。なお第１図ａは組立体全体の縦
断面図、同図ｂはカンチレバー３部分のみの正面
図である。 Conventionally, as shown in FIGS. 1a and 1b, the assembly of a diaphragm and a strain body of this type of signal converter consists of a disk-shaped diaphragm 1 supported at its periphery.
It has a block shape with both ends functioning as a rigid body, one end is supported, the other end is bent, and the middle part is formed in a strip shape, and the strip near the connection part with the rigid body part. A cantilever 3 as a strain body to which a strain gauge 2 is attached with a detection portion corresponding to the back surface receives a displacement of the center of the diaphragm 1 and applies a force corresponding to the displacement to the other end of the cantilever 3. It was composed of a transmission rod 4 for transmitting data. Note that FIG. 1a is a longitudinal cross-sectional view of the entire assembly, and FIG. 1b is a front view of only the cantilever 3 portion.
第２図にこのような組立体を圧力変換器に応用
した構成例を示す。 FIG. 2 shows an example of a configuration in which such an assembly is applied to a pressure transducer.
第２図においては第１図と同様の部分には同符
号を付して示しており、５はダイヤフラム１を支
持する外筒、６はダイヤフラム１を変形させる圧
力媒体（液体、気体等）を導入する導入口６ａを
有する導入部、７はカンチレバー３を外筒５に固
定する固定部材、８はひずみゲージ２に対する配
線用の配線基板、９はカンチレバー３、配線基板
８等からなる部分を保護するためのケース、１０
は配線基板８から信号線を外部に導出するための
防水コネクタ、１１はシール用のＯリング、１２
はコネクタ押えである。 In FIG. 2, the same parts as in FIG. An introduction part having an introduction port 6a for introduction, 7 a fixing member for fixing the cantilever 3 to the outer cylinder 5, 8 a wiring board for wiring to the strain gauge 2, 9 protecting a portion consisting of the cantilever 3, the wiring board 8, etc. Case for, 10
11 is a waterproof connector for leading the signal line to the outside from the wiring board 8; 11 is an O-ring for sealing; 12
is the connector holder.
このような、組立体の動作を第２図に示す圧力
変換器を例にとつて説明する。 The operation of such an assembly will be explained using the pressure transducer shown in FIG. 2 as an example.
導入部６の導入口６ａから圧力媒体が導入され
ダイヤフラム１に圧力がかかるとダイヤフラム１
は圧力により変形しその変位に応じた力が伝達棒
４を介してカンチレバー３に伝達されカンチレバ
ー３が変形して該カンチレバー３に添着されたひ
ずみゲージ２には該変形（すなわち前記圧力に応
じた変形）に応じたひずみ出力が発生する。 When the pressure medium is introduced from the introduction port 6a of the introduction part 6 and pressure is applied to the diaphragm 1, the diaphragm 1
is deformed by the pressure, and a force corresponding to the displacement is transmitted to the cantilever 3 via the transmission rod 4, the cantilever 3 is deformed, and the strain gauge 2 attached to the cantilever 3 undergoes the deformation (that is, the force corresponding to the pressure). A strain output is generated according to the deformation).
ところで、このような組立体は主として低容量
の圧力変換器等に使用される。そして、低容量に
なればなる程所要の出力を得るためには、ダイヤ
フラム１やカンチレバー３の中間部の肉厚を薄く
形成して感度を上げる必要があり、結果的にダイ
ヤフラム１の肉厚に対する変位の量が大きくな
る。このようにダイヤフラム１の肉厚に対する変
位の量が大きくなればなる程ダイヤフラム１の圧
力−変換特性あるいは圧力−力変換特性の直線性
は悪くなり例えば圧力−力変換特性の一例を第３
図に示すように圧力によつて発生する力の増加率
は圧力上昇に伴なつて低下する。これに対して、
カンチレバー３単体では通常の変換器の出力レベ
ルでは充分に良好な直線性が得られ、第４図にカ
ンチレバー３に印加された力に対するカンチレバ
ー３に添着されたひずみゲージ２による力−ひず
み出力変換特性の一例を示すようにほとんど非直
線成分を含まない。したがつて、これらの組合せ
による総合的な圧力−ひずみ出力変換特性はダイ
ヤフラム１の圧力−力変換特性に大きく影響され
る。一般にこのダイヤフラム１の非直線性による
悪影響を小さくするため、直線性のよいカンチレ
バー３の板厚を相対的に厚く、ダイヤフラム１の
板厚を薄くして、カンチレバー３とダイヤフラム
１とのばね定数の比が大きくなるように努力され
るが、機械加工上の限界があるためダイヤフラム
１の板厚はある程度（通常0.2mm程度）以上は薄
くすることができず、結果的には第５図に組立体
全体の圧力−ひずみ出力変換特性の一例を示すよ
うに直線性が悪いものであつた。また、カンチレ
バー３の加工製作はその形状から主にフライス加
工によらねばならず、製作費が高くつくという欠
点もあつた。 Incidentally, such an assembly is mainly used for low capacity pressure transducers and the like. As the capacitance decreases, in order to obtain the required output, it is necessary to make the middle part of the diaphragm 1 and the cantilever 3 thinner to increase the sensitivity. The amount of displacement increases. In this way, the greater the amount of displacement relative to the wall thickness of the diaphragm 1, the worse the linearity of the pressure-force conversion characteristic or pressure-force conversion characteristic of the diaphragm 1 becomes.
As shown in the figure, the rate of increase in the force generated by pressure decreases as the pressure increases. On the contrary,
With the cantilever 3 alone, sufficiently good linearity can be obtained at the output level of a normal transducer, and Figure 4 shows the force-strain output conversion characteristics of the strain gauge 2 attached to the cantilever 3 with respect to the force applied to the cantilever 3. As shown in the example, it contains almost no non-linear components. Therefore, the overall pressure-strain output conversion characteristics resulting from these combinations are greatly influenced by the pressure-force conversion characteristics of the diaphragm 1. Generally, in order to reduce the adverse effects of the nonlinearity of the diaphragm 1, the cantilever 3, which has good linearity, is made relatively thick, and the diaphragm 1 is made thin, thereby reducing the spring constant between the cantilever 3 and the diaphragm 1. Efforts were made to increase the ratio, but due to limitations in machining, the thickness of diaphragm 1 could not be made thinner than a certain level (usually about 0.2 mm), and as a result, the assembly shown in Figure 5 was made. The linearity was poor, as shown by an example of the pressure-strain output conversion characteristics of the entire solid. Furthermore, the cantilever 3 has to be manufactured mainly by milling due to its shape, which has the drawback of increasing manufacturing costs.
本発明は、このような事情に鑑みてなされたも
ので、直線性を改善ししかも製作費の低廉化も図
り得るダイヤフラムと起歪体の組立体を提供する
ことを目的としている。 The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide an assembly of a diaphragm and a strain body that can improve linearity and reduce manufacturing costs.
即ち、本発明の特徴は、起歪体をダイヤフラム
からの力が中央部に与えられ且つ各端部において
支持されるビーム状をなすとともにその変形方向
についての一方の面に前記中央部を中心とする円
弧状の応力集中溝を形成してその背面にひずみゲ
ージを添着した構成とし、前記応力集中溝は前記
ダイヤフラムの変換特性に対応しその非直線性を
補償する非直線変換特性を呈するごとく設定する
ことにある。 That is, the feature of the present invention is that the strain-generating body is shaped like a beam to which the force from the diaphragm is applied at the center and is supported at each end, and the strain body is shaped like a beam with the center being the center on one surface in the direction of deformation. An arcuate stress concentration groove is formed and a strain gauge is attached to the back surface of the stress concentration groove, and the stress concentration groove is set to exhibit a nonlinear conversion characteristic that corresponds to the conversion characteristic of the diaphragm and compensates for its nonlinearity. It's about doing.
以下、図面を参照して本発明の一実施例を説明
する。 Hereinafter, one embodiment of the present invention will be described with reference to the drawings.
第６図ａおよびｂに本実施例の組立体の縦断面
図および正面図を示す。第６図ａ，ｂにおいて、
ダイヤフラム１および伝達棒４は第１図ａ，ｂの
場合とほぼ同様である。起歪体はダイヤフラム１
の外周支持部と周縁部において一体に結合された
円板状部１３の一方の面、この場合ダイヤフラム
１側の面に２本の同心円状の溝１４，１５が設け
られ、さらに該円板状部１３の任意の直径に平行
に中心を挾んで２本のスリツト状の透孔１６，１
７が穿設されて形成され両端部が支持された帯板
状をなす一文字ビーム状の起歪体１８により構成
される。この起歪体１８は中心部において伝達棒
４に溶接等によつて固着連結されている。前記溝
１４，１５はこの起歪体１８の部分において円弧
状の応力集中溝１４ａ，１４ｂ，１５ａ，１５ｂ
を形成する。この応力集中溝１４ａ，１４ｂ，１
５ａ，１５ｂとなる溝１４，１５の断面形状は半
円状あるいはＵ字状あるいはコ字状のいずれでも
よい。（図ではＵ字溝の場合を示している。）そし
て、起歪体１８の応力集中溝１４ａ，１５ａおよ
び１４ｂ，１５ｂの背面側には各溝部分に検出部
を対応させてひずみゲージ１９，２０を添着す
る。 FIGS. 6a and 6b show a longitudinal sectional view and a front view of the assembly of this embodiment. In Figures 6a and b,
The diaphragm 1 and the transmission rod 4 are substantially the same as in FIGS. 1a and 1b. The strain body is diaphragm 1
Two concentric grooves 14 and 15 are provided on one surface of the disc-shaped part 13 which is integrally connected to the outer peripheral support part of the disc-shaped part at the peripheral part thereof, in this case, the surface on the diaphragm 1 side. Two slit-shaped through holes 16, 1 are formed parallel to the arbitrary diameter of the portion 13 and sandwiched at the center.
It is constituted by a linear beam-shaped strain-generating body 18 which is formed by perforating 7 and is supported at both ends. The strain body 18 is fixedly connected to the transmission rod 4 at its center by welding or the like. The grooves 14, 15 are arcuate stress concentration grooves 14a, 14b, 15a, 15b in the strain body 18.
form. These stress concentration grooves 14a, 14b, 1
The cross-sectional shapes of the grooves 14 and 15, which become the grooves 5a and 15b, may be semicircular, U-shaped, or U-shaped. (The figure shows the case of a U-shaped groove.) Then, on the back side of the stress concentration grooves 14a, 15a and 14b, 15b of the strain body 18, a strain gauge 19 is installed, with a detection part corresponding to each groove part. Attach 20.
第７図にこのような組立体を圧力変換器に応用
した具体的構成例を示す。 FIG. 7 shows a specific configuration example in which such an assembly is applied to a pressure transducer.
第７図においては、第２図および第６図ａ，ｂ
と同様の部分に同様の符号を付して示し、その説
明を省略する。 In Fig. 7, Fig. 2 and Fig. 6 a, b
The same parts are shown with the same reference numerals, and the explanation thereof will be omitted.
上述のように構成した一文字ビーム状の起歪体
１８単体における力−ひずみ出力変換特性は、通
常の変換器の出力レベル（約4000×10-6ひずみ）
程度では、第８図に示すように力により発生する
ひずみ出力の増加率が力の増大とともに大きくな
るという特性を持つている。 The force-strain output conversion characteristic of the single beam-shaped strain body 18 configured as described above is the output level of a normal converter (approximately 4000×10 -6 strain).
As shown in FIG. 8, the rate of increase in strain output caused by force increases as the force increases.
また、この変換特性は応力集中溝１４ａ，１４
ｂ，１５ａ，１５ｂの円弧状の半径の大きさによ
つて変化させることができる。すなわち、該半径
を大きくすると応力集中溝１４ａ〜１５ｂは直線
に近くなり、従来のカンチレバーの特性に近くな
つて、前記変換特性曲線は曲率が小さく直線に近
くなる。そして、該半径を小さくすると力の増加
に対するひずみ出力の増加率は大きくなり変換特
性曲線の曲率が大きくなる。また、半径の異なる
２種の応力集中溝１４ａと１５ａ（１４ｂと１５
ｂ）間の距離（ひずみゲージ、検出部間の距離に
等しい）を一定とし、半径だけを変化させると、
第９図ａ，ｂ、第１０図ａ，ｂおよび第１１図
ａ，ｂに示すようにひずみ出力値はほとんど同じ
で前記変換特性だけを変化させることができる。
第９図〜第１１図で、ｌは応力集中溝１４ａ−１
５ａ（１４ｂ−１５ｂ）間の距離で一定であり、
r1〜r3は半径でr1＜r2＜r3である。 Moreover, this conversion characteristic is the stress concentration groove 14a, 14
It can be changed depending on the radius of the arcs b, 15a, and 15b. That is, when the radius is increased, the stress concentration grooves 14a to 15b become closer to a straight line, and the characteristics become closer to those of a conventional cantilever, and the conversion characteristic curve has a smaller curvature and becomes closer to a straight line. When the radius is made smaller, the rate of increase in strain output with respect to increase in force becomes larger, and the curvature of the conversion characteristic curve becomes larger. In addition, two types of stress concentration grooves 14a and 15a (14b and 15
b) If the distance between (equal to the distance between the strain gauge and detection part) is constant and only the radius is changed, then
As shown in FIGS. 9a and 9b, FIGS. 10a and 10b, and FIGS. 11a and 11b, the strain output values are almost the same and only the conversion characteristics can be changed.
In FIGS. 9 to 11, l is the stress concentration groove 14a-1
The distance between 5a (14b-15b) is constant,
r 1 to r 3 are radii and satisfies r 1 < r 2 < r 3 .
従つて、この起歪体１８によれば、ダイヤフラ
ム１の変換特性の非直線性を補償するような非直
線変換特性を得ることができるので、ダイヤフラ
ム１の変換特性に対応して応力集中溝１４ａ〜１
５ｂの半径等を定め起歪体１８の変換特性を設定
することにより、組立体全体の圧力−ひずみ出力
変換特性の直線性を非常に良好にすることが可能
となる。 Therefore, according to this strain-generating body 18, it is possible to obtain a non-linear conversion characteristic that compensates for the non-linearity of the conversion characteristic of the diaphragm 1. ~1
By determining the radius of 5b and setting the conversion characteristics of the strain body 18, it becomes possible to make the linearity of the pressure-strain output conversion characteristics of the entire assembly very good.
例えば、ダイヤフラム１と起歪体１８のばね定
数の比が１：３で、ダイヤフラム１の変換特性曲
線が第１２図ａに示すように直線からの最大偏差
が＋ａであつたとすると、起歪体１８として第１
２図ｂに示すように変換特性曲線の直線からの最
大偏差が−a/3となるように応力集中溝半径等を
選定したものを組合わせればよい。このようにダ
イヤフラム１と起歪体１８を組合わせて組立体を
構成した場合、全体の変換特性としては第１２図
ｃに示すように良好な直線性を示す。 For example, if the ratio of the spring constants of the diaphragm 1 and the flexure element 18 is 1:3, and the maximum deviation of the conversion characteristic curve of the diaphragm 1 from a straight line is +a as shown in FIG. 1st as 18
As shown in FIG. 2b, the stress concentration groove radius, etc. may be selected so that the maximum deviation from the straight line of the conversion characteristic curve is -a/3. When the diaphragm 1 and the strain body 18 are combined to form an assembly in this way, the overall conversion characteristic exhibits good linearity as shown in FIG. 12c.
このように、ダイヤフラム１と起歪体１８の変
換特性を相殺させて非常に直線性の良好な信号変
換器の組立体を構成することができる。また、従
来装置のようにダイヤフラム１と起歪体１８のば
ね定数の比によつて変換特性が左右されないの
で、ダイヤフラム１の板厚を極限まで薄く形成し
たりする必要がなく、また、起歪体１８がほとん
ど旋盤加工のみで加工でき、フライス加工の依存
率が高い場合に比してはるかに安価にしかも高精
度に製作できるという加工上の大きな利点があ
る。更に、直線性の改善のための複雑な回路を設
けることなく、上記の如く機械的補償手段で足り
るから信号変換器全体の構成が簡単化され、コス
トを低減させ得る利点がある。 In this way, the conversion characteristics of the diaphragm 1 and the strain body 18 can be canceled out, and a signal converter assembly with very good linearity can be constructed. In addition, unlike conventional devices, the conversion characteristics are not affected by the ratio of the spring constants of the diaphragm 1 and the strain-generating body 18, so there is no need to make the thickness of the diaphragm 1 as thin as possible, and the strain-generating body There is a great advantage in processing that the body 18 can be processed almost exclusively by lathe processing, and can be manufactured at a much lower cost and with higher precision than when milling is highly dependent. Furthermore, since the above-mentioned mechanical compensation means is sufficient without providing a complicated circuit for improving linearity, the overall structure of the signal converter is simplified and there is an advantage that costs can be reduced.
なお、上記実施例では、ダイヤフラムに対して
液体、気体等の圧力媒体が分布（均等）荷重とし
て負荷される圧力変換器に応用した場合につき説
明したが、本発明はダイヤフラムに対して集中荷
重が負荷される荷重変換器等にも応用することが
できる。 In the above embodiments, a pressure medium such as liquid or gas is applied to a diaphragm as a distributed (uniform) load. It can also be applied to load transducers and the like.
第１３図は、荷重変換器に応用した場合の実施
例を示している。第１３図において、２１はケー
ス、２２は信号導出用のコードである。 FIG. 13 shows an embodiment in which the present invention is applied to a load converter. In FIG. 13, 21 is a case, and 22 is a code for deriving a signal.
本発明を荷重変換器に応用すれば、上記利点の
他、例えばダイヤフラムに対して側方方向や偏心
方向の成分を含む荷重が負荷された場合であつて
も垂直方向の荷重成分のみを有効に検出、変換で
きると共にシーリング性を向上できるという利点
がある。 If the present invention is applied to a load transducer, in addition to the above-mentioned advantages, for example, even if a load including lateral or eccentric components is applied to the diaphragm, only the vertical load component will be effective. It has the advantage of being able to be detected and converted as well as improving sealing properties.
また、起歪体は一文字ビーム状の他、第１４図
に示すような十文字ビーム状の起歪体２３として
もよい。 Further, the strain generating body 23 may be in the shape of a cross beam as shown in FIG. 14, in addition to the shape of a straight beam.
その他、本発明は、種々の変形実施が可能であ
る。 In addition, the present invention can be implemented in various modifications.
以上詳述したように、本発明によれば、直線性
を改善し、しかも構成簡単で製作費の低廉化も図
り得る信号変換器におけるダイヤフラムと起歪体
の組立体を提供することができる。 As described in detail above, according to the present invention, it is possible to provide an assembly of a diaphragm and a strain body in a signal converter that improves linearity, has a simple structure, and can reduce manufacturing costs.
第１図ａおよびｂはそれぞれ従来の組立体の構
成の一例を示す縦断面図および要部の正面図、第
２図は同例を用いた圧力変換器の具体的な構成の
一例を示す縦断面図、第３図〜第５図は従来装置
の問題点を説明するための特性図、第６図ａおよ
びｂは本発明の一実施例の構成を示す縦断面図お
よび正面図、第７図は同実施例を用いた圧力変換
器の具体的な構成の一例を示す縦断面図、第８図
〜第１２図は同実施例を説明するための図、第１
３図および第１４図は本発明のそれぞれ異なる他
の実施例の構成を示す図である。
１…ダイヤフラム、１８，２３…起歪体、１４
ａ，１４ｂ，１５ａ，１５ｂ…応力集中溝、１
９，２０…ひずみゲージ。
Figures 1a and b are a longitudinal cross-sectional view and a front view of essential parts, respectively, showing an example of the configuration of a conventional assembly, and Figure 2 is a longitudinal cross-section showing an example of a specific configuration of a pressure transducer using the same example. FIGS. 3 to 5 are characteristic diagrams for explaining the problems of the conventional device. FIGS. The figure is a vertical sectional view showing an example of a specific configuration of a pressure transducer using the same embodiment, FIGS. 8 to 12 are diagrams for explaining the same embodiment,
3 and 14 are diagrams showing the configurations of other different embodiments of the present invention. 1...Diaphragm, 18, 23...Strain element, 14
a, 14b, 15a, 15b... stress concentration groove, 1
9,20...Strain gauge.
Claims (1)
換するダイヤフラムと、このダイヤフラムの変位
によつて生じた力が機械的に伝達されて変形を生
じこの変形部に添着されたひずみゲージによつて
該力を電気信号に変換する起歪体とを備える信号
変換器において、前記起歪体は前記ダイヤフラム
からの力が、中央部に与えられ且つ各端部におい
て支持されるビーム状をなすと共にその変形方向
についての一方の面に前記中央部を中心とする円
弧状の応力集中溝を形成してその背面にひずみゲ
ージを添着した構成とし、前記応力集中溝は前記
ダイヤフラムの変換特性に対応しその非直線性を
補償する非直線変換特性を呈するごとく設定した
ことを特徴とする信号変換器におけるダイヤフラ
ムと起歪体の組立体。 ２ 起歪体は一文字ビーム状をなすことを特徴と
する特許請求の範囲第１項記載信号検出器におけ
るダイヤフラムと起歪体の組立体。 ３ 起歪体は十文字ビーム状をなすことを特徴と
する特許請求の範囲第１項記載信号変換器におけ
るダイヤフラムと起歪体の組立体。[Claims] 1. A diaphragm that is displaced in response to pressure or load and converts it into force, and the force generated by the displacement of this diaphragm is mechanically transmitted to cause deformation and is attached to this deformed portion. A signal converter comprising a strain-generating body that converts the force into an electrical signal by a strain gauge, wherein the strain-generating body receives the force from the diaphragm at a central portion and is supported at each end. It has a beam shape, and has an arc-shaped stress concentration groove centered on the center part formed on one surface in the deformation direction, and a strain gauge is attached to the back surface of the stress concentration groove, and the stress concentration groove is formed on one side of the diaphragm. An assembly of a diaphragm and a strain body in a signal converter, characterized in that it is set to exhibit nonlinear conversion characteristics that correspond to the conversion characteristics and compensate for the nonlinearity thereof. 2. An assembly of a diaphragm and a strain body in a signal detector according to claim 1, wherein the strain body has a straight beam shape. 3. An assembly of a diaphragm and a strain body in a signal converter according to claim 1, wherein the strain body has a cross beam shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3193181A JPS57147024A (en) | 1981-03-07 | 1981-03-07 | Assembly of diaphragm and strain inducer for signal converter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3193181A JPS57147024A (en) | 1981-03-07 | 1981-03-07 | Assembly of diaphragm and strain inducer for signal converter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57147024A JPS57147024A (en) | 1982-09-10 |
| JPS6314891B2 true JPS6314891B2 (en) | 1988-04-02 |
Family
ID=12344711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3193181A Granted JPS57147024A (en) | 1981-03-07 | 1981-03-07 | Assembly of diaphragm and strain inducer for signal converter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57147024A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0438272Y2 (en) * | 1984-10-05 | 1992-09-08 | ||
| JPS62134043U (en) * | 1986-02-17 | 1987-08-24 | ||
| JPS6428528A (en) * | 1987-07-24 | 1989-01-31 | Nec Corp | Highly sensitive semiconductor pressure sensor |
| KR890010548A (en) * | 1987-12-16 | 1989-08-09 | 로버트 제이. 에드워즈 | Dual pressure sensor |
| JP6147110B2 (en) * | 2013-06-20 | 2017-06-14 | 日立オートモティブシステムズ株式会社 | Pressure detection device |
-
1981
- 1981-03-07 JP JP3193181A patent/JPS57147024A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57147024A (en) | 1982-09-10 |
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