JPS63147821U - - Google Patents

Info

Publication number

JPS63147821U

JPS63147821U JP4022287U JP4022287U JPS63147821U JP S63147821 U JPS63147821 U JP S63147821U JP 4022287 U JP4022287 U JP 4022287U JP 4022287 U JP4022287 U JP 4022287U JP S63147821 U JPS63147821 U JP S63147821U

Authority

JP

Japan

Prior art keywords

link

base electrode

polysilicon layer

layer provided

insulating film

Prior art date

1987-03-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 4
• 238000005530 etching Methods 0.000 claims description 2
• 239000010410 layer Substances 0.000 claims 2
• 229910021420 polycrystalline silicon Inorganic materials 0.000 claims 2
• 229920005591 polysilicon Polymers 0.000 claims 2
• 239000011229 interlayer Substances 0.000 claims 1
• 238000002161 passivation Methods 0.000 claims 1
• OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 239000011521 glass Substances 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1