JPS63147816U - - Google Patents

Info

Publication number

JPS63147816U

JPS63147816U JP3950187U JP3950187U JPS63147816U JP S63147816 U JPS63147816 U JP S63147816U JP 3950187 U JP3950187 U JP 3950187U JP 3950187 U JP3950187 U JP 3950187U JP S63147816 U JPS63147816 U JP S63147816U

Authority

JP

Japan

Prior art keywords

ion beam

etching

etching chamber

magnetic field

field pipe

Prior art date

1987-03-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005530 etching Methods 0.000 claims description 6
• 238000010884 ion-beam technique Methods 0.000 claims 4
• 238000010586 diagram Methods 0.000 description 1