JPS63147812U - - Google Patents
Info
- Publication number
- JPS63147812U JPS63147812U JP3936787U JP3936787U JPS63147812U JP S63147812 U JPS63147812 U JP S63147812U JP 3936787 U JP3936787 U JP 3936787U JP 3936787 U JP3936787 U JP 3936787U JP S63147812 U JPS63147812 U JP S63147812U
- Authority
- JP
- Japan
- Prior art keywords
- disc
- shaped body
- crystal growth
- substrate holder
- molecular beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 239000013078 crystal Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3936787U JPS63147812U (fi) | 1987-03-18 | 1987-03-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3936787U JPS63147812U (fi) | 1987-03-18 | 1987-03-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63147812U true JPS63147812U (fi) | 1988-09-29 |
Family
ID=30852462
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3936787U Pending JPS63147812U (fi) | 1987-03-18 | 1987-03-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63147812U (fi) |
-
1987
- 1987-03-18 JP JP3936787U patent/JPS63147812U/ja active Pending