JPS63147639U - - Google Patents
Info
- Publication number
- JPS63147639U JPS63147639U JP3885087U JP3885087U JPS63147639U JP S63147639 U JPS63147639 U JP S63147639U JP 3885087 U JP3885087 U JP 3885087U JP 3885087 U JP3885087 U JP 3885087U JP S63147639 U JPS63147639 U JP S63147639U
- Authority
- JP
- Japan
- Prior art keywords
- booth
- work opening
- clean
- provided below
- clean room
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Ventilation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3885087U JPS63147639U (enExample) | 1987-03-17 | 1987-03-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3885087U JPS63147639U (enExample) | 1987-03-17 | 1987-03-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63147639U true JPS63147639U (enExample) | 1988-09-29 |
Family
ID=30851484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3885087U Pending JPS63147639U (enExample) | 1987-03-17 | 1987-03-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63147639U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5552261U (enExample) * | 1978-10-02 | 1980-04-07 |
-
1987
- 1987-03-17 JP JP3885087U patent/JPS63147639U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5552261U (enExample) * | 1978-10-02 | 1980-04-07 |