JPS63147639U - - Google Patents

Info

Publication number
JPS63147639U
JPS63147639U JP3885087U JP3885087U JPS63147639U JP S63147639 U JPS63147639 U JP S63147639U JP 3885087 U JP3885087 U JP 3885087U JP 3885087 U JP3885087 U JP 3885087U JP S63147639 U JPS63147639 U JP S63147639U
Authority
JP
Japan
Prior art keywords
booth
work opening
clean
provided below
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3885087U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3885087U priority Critical patent/JPS63147639U/ja
Publication of JPS63147639U publication Critical patent/JPS63147639U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP3885087U 1987-03-17 1987-03-17 Pending JPS63147639U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3885087U JPS63147639U (enrdf_load_stackoverflow) 1987-03-17 1987-03-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3885087U JPS63147639U (enrdf_load_stackoverflow) 1987-03-17 1987-03-17

Publications (1)

Publication Number Publication Date
JPS63147639U true JPS63147639U (enrdf_load_stackoverflow) 1988-09-29

Family

ID=30851484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3885087U Pending JPS63147639U (enrdf_load_stackoverflow) 1987-03-17 1987-03-17

Country Status (1)

Country Link
JP (1) JPS63147639U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5552261U (enrdf_load_stackoverflow) * 1978-10-02 1980-04-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5552261U (enrdf_load_stackoverflow) * 1978-10-02 1980-04-07

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