JPS63145866U - - Google Patents

Info

Publication number
JPS63145866U
JPS63145866U JP3780887U JP3780887U JPS63145866U JP S63145866 U JPS63145866 U JP S63145866U JP 3780887 U JP3780887 U JP 3780887U JP 3780887 U JP3780887 U JP 3780887U JP S63145866 U JPS63145866 U JP S63145866U
Authority
JP
Japan
Prior art keywords
molecular beam
crucible
beam source
evaporated material
heater
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3780887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0345953Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3780887U priority Critical patent/JPH0345953Y2/ja
Publication of JPS63145866U publication Critical patent/JPS63145866U/ja
Application granted granted Critical
Publication of JPH0345953Y2 publication Critical patent/JPH0345953Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP3780887U 1987-03-13 1987-03-13 Expired JPH0345953Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3780887U JPH0345953Y2 (enrdf_load_html_response) 1987-03-13 1987-03-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3780887U JPH0345953Y2 (enrdf_load_html_response) 1987-03-13 1987-03-13

Publications (2)

Publication Number Publication Date
JPS63145866U true JPS63145866U (enrdf_load_html_response) 1988-09-27
JPH0345953Y2 JPH0345953Y2 (enrdf_load_html_response) 1991-09-27

Family

ID=30849467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3780887U Expired JPH0345953Y2 (enrdf_load_html_response) 1987-03-13 1987-03-13

Country Status (1)

Country Link
JP (1) JPH0345953Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH0345953Y2 (enrdf_load_html_response) 1991-09-27

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