JPS6314578U - - Google Patents
Info
- Publication number
- JPS6314578U JPS6314578U JP10702686U JP10702686U JPS6314578U JP S6314578 U JPS6314578 U JP S6314578U JP 10702686 U JP10702686 U JP 10702686U JP 10702686 U JP10702686 U JP 10702686U JP S6314578 U JPS6314578 U JP S6314578U
- Authority
- JP
- Japan
- Prior art keywords
- section
- cell
- cracker
- kratzker
- kratzkasel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 4
- 239000002826 coolant Substances 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 239000000498 cooling water Substances 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10702686U JPH043005Y2 (https=) | 1986-07-12 | 1986-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10702686U JPH043005Y2 (https=) | 1986-07-12 | 1986-07-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6314578U true JPS6314578U (https=) | 1988-01-30 |
| JPH043005Y2 JPH043005Y2 (https=) | 1992-01-31 |
Family
ID=30982922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10702686U Expired JPH043005Y2 (https=) | 1986-07-12 | 1986-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH043005Y2 (https=) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0343916U (https=) * | 1989-09-06 | 1991-04-24 | ||
| JPH0343914U (https=) * | 1989-09-06 | 1991-04-24 | ||
| JPH0343915U (https=) * | 1989-09-06 | 1991-04-24 |
-
1986
- 1986-07-12 JP JP10702686U patent/JPH043005Y2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0343916U (https=) * | 1989-09-06 | 1991-04-24 | ||
| JPH0343914U (https=) * | 1989-09-06 | 1991-04-24 | ||
| JPH0343915U (https=) * | 1989-09-06 | 1991-04-24 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH043005Y2 (https=) | 1992-01-31 |