JPS6314560U - - Google Patents
Info
- Publication number
- JPS6314560U JPS6314560U JP10674886U JP10674886U JPS6314560U JP S6314560 U JPS6314560 U JP S6314560U JP 10674886 U JP10674886 U JP 10674886U JP 10674886 U JP10674886 U JP 10674886U JP S6314560 U JPS6314560 U JP S6314560U
- Authority
- JP
- Japan
- Prior art keywords
- roll
- seal
- chamber
- rolls
- vacuum processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 7
- 238000005096 rolling process Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Heat Treatment Of Strip Materials And Filament Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10674886U JPS6314560U (fr) | 1986-07-14 | 1986-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10674886U JPS6314560U (fr) | 1986-07-14 | 1986-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6314560U true JPS6314560U (fr) | 1988-01-30 |
Family
ID=30982392
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10674886U Pending JPS6314560U (fr) | 1986-07-14 | 1986-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6314560U (fr) |
-
1986
- 1986-07-14 JP JP10674886U patent/JPS6314560U/ja active Pending