JPS6314557U - - Google Patents
Info
- Publication number
- JPS6314557U JPS6314557U JP10674586U JP10674586U JPS6314557U JP S6314557 U JPS6314557 U JP S6314557U JP 10674586 U JP10674586 U JP 10674586U JP 10674586 U JP10674586 U JP 10674586U JP S6314557 U JPS6314557 U JP S6314557U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- sealing device
- opposing wall
- strip
- wall plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims 4
Landscapes
- Physical Vapour Deposition (AREA)
- Heat Treatment Of Strip Materials And Filament Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10674586U JPS6314557U (cs) | 1986-07-14 | 1986-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10674586U JPS6314557U (cs) | 1986-07-14 | 1986-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6314557U true JPS6314557U (cs) | 1988-01-30 |
Family
ID=30982386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10674586U Pending JPS6314557U (cs) | 1986-07-14 | 1986-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6314557U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03125062U (cs) * | 1990-03-28 | 1991-12-18 |
-
1986
- 1986-07-14 JP JP10674586U patent/JPS6314557U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03125062U (cs) * | 1990-03-28 | 1991-12-18 |